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Plasma cleaner, all you want to know is here

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Published on:

25 Sep,2020

Plasma cleaner, all you want to know is here:

In view of the current support and purchase of our chengfeng intelligent plasma cleaning machine customers, in the process of daily use of the problems encountered, CRF Sing Fung Intelligent Manufacturing engineer with text to summarize the following points (for reference only) :

Q: What should I do if I find the test effect is not good?

A: Please check whether the color of the pump oil is dull and dirty, and replace the pump oil in time.

Q: What if the device doesn't glow?

A: 1. Rf lamps do not provide RF;

2. There may be air leakage in the sealing.

Q: How do I troubleshoot RF lamps?

A: Use the standard test lamp tube of the equipment, put it into the main body cavity, turn on the "RF" switch to "Hi", and judge the RF lamp problem by observing the status of the lamp tube (vacuum is not required in this process).

Q: How to solve the sealing problem?

A: 1. Ensure that the vacuum pump used can achieve or exceed the minimum pumping speed of 1.4 cubic meters per hour and the ultimate negative pressure is not greater than 200mTorr;

2. Then check whether the vacuum hose, all hose clamps and gas inlet pipe connection parts are correct and tighten, whether the plasma cleaning hatch door is closed correctly, and whether the sealing ring of the door is clean and free of defects.

Q: Are there any recommended cleaning process parameters?

A: The RF power level should be set to medium or high. 600-800 millitotor pressure and 1-3 minute treatment time are the initial values of the better process parameters. The optimum process parameter values will depend on the sample material and the intended application, and some experiments will be required to determine these optimum values.

Q: How to measure the vacuum negative pressure?

A: You can ask us to buy corresponding measuring equipment, such as vacuum monitoring unit or gas flow mixer.

Q: Why does the pump oil return?

A: If the auxiliary pump is an oil pump, the oil may return from the vacuum pump to pollute the system if the internal pressure of the equipment cabin is not reduced immediately after the process is completed. We suggest using A vacuum pump with anti-return suction function.

Q: How to clean the inner wall of the vacuum chamber?

A: The inner wall, door and O-ring of the vacuum chamber should be cleaned regularly. Please refer to the standard laboratory glassware cleaning method. For example, the surface of the plasma chamber can be soaked with alcohol, acetone or isopropyl alcohol or gently wiped.

Plasma has the following major effects on the surface treatment of materials:

Activation: greatly improve the surface infiltration performance, form an active surface;

Cleaning: dust and grease removal, fine cleaning and static removal;

Coating: To provide a functional surface by surface coating treatment; Improve the surface adhesion ability, improve the reliability and durability of surface adhesion.

The surface energy of all kinds of polymer plastics, ceramics, glass, PVC, paper, metal and other materials can be improved by atmospheric plasma treatment. Through this treatment process, the surface tension properties of the products can be improved, more suitable for industrial coating, bonding and other treatment requirements.

CRF Sing Fung Intelligent  Manufacturing

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