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What are the special features of plasma excited state in plasma equipment

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plasma

Published on:

10 Sep,2021

What are the special features of plasma excited state in plasma equipment:
plasmaThe plasma generated by the plasma equipment has unique physical and chemical properties and can be used in processes such as plasma cleaning, plasma activation, plasma etching and plasma deposition. What is its special function?
1. The temperature of electrons is higher, and the kinetic energy of particles is higher.
2. As an aggregate state of charged particles, it has conductivity similar to that of metals.
3. The chemical properties are active, and chemical reactions are prone to occur, such as the removal of organic matter by plasma.
4. Luminous characteristics, can produce a variety of light sources. For example, neon lights, mercury fluorescent lights, etc. are all plasma luminescence phenomena.
The plasma generated by the plasma device has the above characteristics, which is caused by the collision between electrons and gas molecules in the plasma. When the collision energy is very small, an elastic collision occurs, and the kinetic energy of the electrons hardly changes. When the collision energy is very high, the low-energy electrons in the molecule will move around the nucleus, and they will get high enough energy during the collision to be excited to move on a high-energy orbit away from the nucleus.
In plasma devices, such molecules in a high-energy state are called excited molecules, and their form is XY*. When the electrons in excited molecules jump from a high energy level to a low energy level, they release excess energy in the form of luminescence, because different light frequencies make people see different colors!
If the energy of the colliding electron is high enough, the energy absorbed by the electron can make it break away from the nucleus and become a free electron, that is, the molecule is ionized. The collision of XY molecules with electrons can also decompose them into X and Y atoms (separation). If ":" is used to represent the bond-forming electron pair in the molecule, the dissociation process can be expressed as X:Y→X.+.Y; in this way, X and unpaired electrons (indicated by the symbols · beside X and Y) are easy A chemical reaction occurs, so it can be called a chemically active species or radical.
Free state atoms such as H, O, CI, and molecules such as CH3, CF2, and SiH3 are all groups in the plasma cleaner. To determine their uncharged nature, we call them neutral groups, which is to be different from ionic groups.

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