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What are the control valves often used in the process gas control of the vacuum plasma surface treatment machine

Keywords:

,plasma

Published on:

03 Sep,2021

What are the control valves often used in the process gas control of the vacuum plasma surface treatment machine:
There are many types of gas channel control valves. The gas channel control valves widely used in vacuum plasma surface treatment machines can be divided into manual and automatic according to the operation mode. According to the control mode, they can be divided into pneumatic control valves and solenoid valves, such as According to the working pressure, it can be divided into vacuum valve and low pressure and medium pressure control valve.
In the vacuum plasma surface treatment machine, the air path control mainly includes two parts: the process air path control and the vacuum path control. In the process gas control part, commonly used control valves include vacuum solenoid valves, check valves (check valves), and pneumatic ball valves. The following is a detailed introduction to the control valves commonly used in the process control of vacuum plasma surface treatment machines.
Commonly used control valves for process gas control:

Vacuum solenoid valve: It is necessary to ensure that the working vacuum in the vacuum chamber is within the design range, so the valve connected to the vacuum chamber must meet the requirements of high vacuum sealing, so vacuum solenoid valves are used for conventional process gas control. Since the process gas adopts single-channel control, the selected vacuum solenoid valve is two-position two-way.
Pneumatic ball valve: Because the pneumatic ball valve has the characteristics of high vacuum sealing, corrosion resistance, and large diameter, it is used for air circuit control when the vacuum plasma cleaning needs to lead to a special monomer. Choose two-way or three-way, you can choose according to actual needs.
Check valve: In the gas circuit control, the check valve is also called the check valve. It mainly plays a role in preventing the backflow of gas, protecting other equipment in the gas circuit control part, and preventing the confluence of reacting gases. Pay attention to the direction of the airflow when using it. There are many types of gas circuit control valves. Its normal operation needs to ensure its vacuum, air tightness and prevent gas backflow. It is very important to choose a suitable control valve. The above is the introduction of the process gas control valve commonly used in the vacuum plasma surface treatment machine, I hope it will be helpful to everyone!
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