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What are the special features of the common gas path control layout of vacuum plasma machines
Keywords:
plasma,machines
Published on:
23 Aug,2021
What are the special features of the common gas path control layout of vacuum plasma machines:
The stable and continuous control of the process gas is one of the factors to ensure the processing effect of the vacuum plasma machine. Chengfeng Zhizao introduced the composition of the gas path control to everyone. What is the common gas path control layout of the vacuum plasma machine? What is special about the composition of the air path, let us study together.
1. Commonly used gas path control layout form of vacuum plasma machine
The gas circuit commonly used in vacuum plasma machines generally includes three main parts: two process gas controls, one air breaking control, and the other compressed air control, namely CDA control.
2. The components and characteristics of the gas circuit of the vacuum plasma machine:
(1) The compressed air control part only needs a set of high-pressure gas, filter screen and output alarm pressure gauge, no other parts are needed; since CDA is the power gas of some components, only an alarm device is required when the gas pressure is insufficient.
(2) The vacuum breaking part adds a large-caliber vacuum solenoid valve on the basis of the CDA control gas circuit. After the process operation is completed, the vacuum breaking gas is input into the vacuum chamber. Because the vacuum breaking gas is usually a high-purity gas, Therefore, no filter is installed in the partially broken air path.
(3) The process gas is usually a high clean gas, and the filter is usually an optional component. The process gas control part mainly includes pressure regulating valve, filter, alarm, alarm output alarm meter, vacuum solenoid valve and quality controller. The process gas is generally two-channel, and multiple process gases can also be configured according to actual needs.
(4) According to this kind of gas circuit arrangement, the air intake sequence is: first the filter delivers the gas to the pressure regulating valve, the pressure gauge outputs the gauge, and then passes through the vacuum solenoid valve and the quality controller in turn.
The above are the common gas path control layouts and the characteristics of various components of vacuum plasma machines. If you have more product details or have questions during use, please click on the online customer service of Chengfeng Zhizao. Chengfeng Zhizao is waiting for your call!
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