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How to check the vacuum pump when the vacuum plasma cleaner is slow in pumping speed

Keywords:

plasma,cleaner

Published on:

09 Aug,2021

How to check the vacuum pump when the vacuum plasma cleaner is slow in pumping speed:
In an article a few days ago, I introduced the effect of material infiltration on the evacuation speed of the vacuum plasma cleaning machine. Although the material infiltration is one of the reasons for the slow down of the vacuum plasma processing system, in fact, the vacuum pump It is very common for problems to cause sabotage and lower efficiency. So how do we check and maintain the vacuum pump correctly? In the vacuum plasma cleaner, when the vacuum capacity drops, it can be run under no load first. If a higher vacuum limit is tested, such as 8Pa, it can be judged that the vacuum pump is faulty. At this time, the vacuum pump needs to be Split inspection. The key inspection contents are as follows.

plasma cleaner1. Inspection of the vacuum oil pump:
The processed product itself contains a lot of impurities, and the vacuum oil is not replaced in time, the vacuum oil will become turbid and viscous. This kind of inspection is mainly to check the oil condition in the vacuum pump chamber. If the quality of the oil drops, it is necessary Replace with new oil.
2. Inspection of the filter element and filter screen of the suction filter of the vacuum pump:
This inspection is mainly to check whether there is a large amount of impurities deposited in the vacuum pump filter element and filter screen of the vacuum plasma cleaner, which causes the mesh to be blocked and affects the suction speed. If it is blocked, it should be cleaned in time.
3. Check the vacuum pump chamber:
This inspection is mainly to check whether there is a large amount of deposits and adhesion of impurities in the vacuum pump chamber. This is because after the vacuum pump is turned on, the impurities in the chamber will begin to flow. If there are too many impurities, the rotor of the vacuum pump will be stuck. Scratches and damages of the rotary vanes at all levels, the sealing of the oil circuit, the break of the exhaust valve, and many other situations have affected the evacuation capacity of the vacuum processing equipment, and even caused the damage of the main components of the vacuum pump.
4. Inspection of the exhaust valve plate:
This inspection is mainly to check the breakage of the exhaust valve sheet. The exhaust valve acts as a one-way valve in the vacuum pump. If the one-way valve breaks, it will fail, resulting in a reduction in the evacuation capacity of the vacuum plasma processing system.
5. Inspection of rotating pieces at all levels:
This project mainly checks whether there is wear and damage to the rotary vanes of the vacuum pump at all levels. If the abrasion or damage is serious, the gap between the rotary vanes will increase and the pumping capacity will be affected.
6. Check the sealing ring:
If the sealing ring of the vacuum pump chamber is damaged, it is easy to cause oil leakage and affect the pumping speed.
7. Check the check valve:
For example, if the check valve of the vacuum plasma cleaner is damaged, the vacuum capacity of the equipment will also be reduced.
Chengfeng Zhizao focuses on the research and development and manufacturing of plasma technology. If you want to have a more detailed understanding of the equipment or have questions about the use of the equipment, please click on the online customer service of Chengfeng Zhizao. Chengfeng Zhizao is waiting for your call!

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