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Plasma bonding process and effect analysis of PDMS matrix plasma cleaning equipment

Keywords:

Plasma,cleaning,equipment

Published on:

29 Jul,2021

Plasma bonding process and effect analysis of PDMS matrix plasma cleaning equipment:
PDMS is a common organic polymer material. It has the characteristics of low raw material price, short production cycle, good durability, flexible packaging method and its ability to form a good seal with a variety of materials. It has many advantages in electronic medicine and other aspects. Huge application prospects.
Although PDMS is widely used, PDMS has shortcomings such as high hydrophobicity and strong adsorption of non-polar substances, making PDMS unable to bond with its own glass metal flakes and other materials under normal conditions to limit its use. PDMS is cleaned by plasma on the surface of the equipment. The above operations can be achieved after modification.

Plasma cleaning equipmentPlasma cleaning equipment processing is a process in which a high-frequency generator ionizes a gas in a vacuum state to generate plasma (the fourth state of the substance) for surface activation modification. Plasma is an ionized gaseous substance composed of atoms deprived of some electrons and positive and negative electrons produced by ionization of atoms. It is the fourth state of matter existing in addition to solid, liquid, and gas.
These highly active particles interact with the surface of the material to be treated, activate the surface of the inert polymer to improve its hydrophilicity, enhance the interaction of the interface and make it easier for monolayer molecules to diffuse to the surface, so that the surface of the PDMS matrix can be modified Realize its bonding with a variety of materials.
There are three main process parameters that affect the PDMS bonding effect in plasma cleaning equipment processing: RF power, air flow, and modification time. At present, most of the researches using oxygen as the reaction gas have found through preliminary experiments that the bonding effect of air as the reaction gas can also meet the experimental requirements.
The bonding loading pressure also has a non-negligible effect on the PDMS bonding effect after plasma treatment.
The PDMS PDMS bonding effect is one of the important focuses in this field. To determine the PDMS PDMS bonding effect is mainly to measure the bonding strength. The T-peel method can be used to determine the bonding strength between two PDMS films.
PDMS-PDMS bonding integrity is also one of the important indicators of bonding effect. Bonding integrity is a necessary condition for the normal use of the microfluidic chip. Part of the bonding will cause the microfluidic chip to fail.
Plasma cleaning equipment processing does not produce a damage layer on the surface, it is a non-destructive processing process, and the surface quality is guaranteed; because it is carried out in a vacuum, it does not pollute the environment and ensures that the cleaned surface is not polluted again, which is effective and environmentally friendly. Chengfeng Zhizao is committed to the research and development of plasma technology, if you have any questions, please feel free to consult.

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