Theoretical analysis of cleaning machine of plasma surface processor
Theoretical analysis of cleaning machine of plasma surface processor：
Let's first simply define what plasma is. A plasma is a glowing gas mass composed of positive ions, electrons, free radicals and neutral gas atoms. For example, a fluorescent lamp or a neon red light shines in the state of plasma shining.
Plasma is mainly produced by the electronic gas atoms to the crash, the neutral gas atoms disintegrate and plasma, but of gas nucleus on the periphery of electronics has a binding energy, we call it the binding energy, the electronic energy must be greater than the binding energy of the outside world, will have the ability to solve from the neutral gas atoms, but the external electronic is often insufficient energy, no dissociative gas atoms in ability, so we have to use to the energy of electrons in an atom on the method of energy, make the electronic has use disintegrate the neutral gas atoms.
Plus energy to electronic, its method is to use parallel plate electrode has been flow voltage, electron in the electrode, will be attracted by positively charged electrode and accelerating, in the process of accelerating electrons can accumulate energy, when the energy of an electron reaches a certain extent, have the ability to ionize the gas atoms, the methods which can produce high density plasma has a lot of kinds, we simply introduce some methods to produce high density plasma, plasma surface treatment machine is modified according to the design.