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What are the factors that cause abnormal discharge of vacuum plasma cleaning machine

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26 Jan,2021

What are the factors that cause abnormal discharge of vacuum plasma cleaning machine:
Why the discharge of the vacuum plasma cleaning machine is abnormal? Please operate the following operations accompanied by professional personnel. The core components of RF plasma cleaning machine are RF power supply and matcher. Because the matcher can not work normally, there may be a normal power start and no discharge in the cavity.

vacuum plasma cleaning machine
1. Matcher fault description:
(1) Air capacitance is only:
Failure reason: the air capacitor in the operation of friction conductive impurities, causing local short circuit, friction caused by the rotor shaft damage, can not be adjusted normally.
(2) Failure of imported transistor:
Failure reasons: the air capacitor moving plate shaft is damaged, the air capacitor can not work normally, the RF output impedance can not be adjusted, the transistor is broken down, etc.; In the process of use, improper adjustment of the initial value of the matcher, too long matching time or unstable glow discharge in the chamber of the vacuum plasma cleaner will also cause damage to the transistor.
2. Matters needing attention in daily use of matcher:
(1) Check the insertion place of the needle regularly in the vacuum chamber to prevent serious oxidation and fracture.
(2) confirm that the electromechanical plate of vacuum plasma cleaning is placed correctly and there is no error in sequence; If the number and spacing of the electrode plate need to be adjusted during use, it is necessary to confirm the automatic matching state of the matcher. If the matching time is long, the initial value needs to be adjusted.
(3) Confirm the initial value of the matcher regularly. Long-term use may lead to deviation of the initial value, which needs to be confirmed regularly and adjusted according to the actual situation.
(4) If there is serious initial deviation, it is necessary to confirm whether the inside of the pair and the air capacitor blade are misplaced and whether there is a ignition phenomenon. If there is a ignition, it should be dealt with in time. The fixed gas capacity blade and the air capacitor actuator blade basically coincide when the volume is adjusted to the maximum; If there is a burning phenomenon, confirm whether the blade is burned out. If the burned position can be polished before use, the distance between the blades is too close, there will be burning phenomenon.
If the capacitor cannot be adjusted, the matcher can be opened and the capacitor can be adjusted manually to confirm whether the blade capacitor can rotate normally. We should pay attention to whether the transmission part of the motor and the air capacitor does not rotate. If it is stuck, we should report it for repair in time. If there is a slip between the gear and the shaft, we can handle it by ourselves first.
3. Other matters
(1) The matcher can be operated for a long time, and attention should be paid to observation and cleaning at ordinary times. To regularly check the pair of internal air capacitor area, open the cover, see if there is any air capacitor friction produced by impurities deposition, if there is, to clean with clean cloth + alcohol, because impurities are usually conductive material, can not be blown with gas, so as to avoid the occurrence of ignition and local control short circuit.
(2) when the vacuum plasma cleaning machine matcher failure occurs, immediately confirm the placement of electrode plates, the placement of pin male female head, shielding box inside connection (if there is a bad contact, whether conducting strip in contact with the outer wall, whether too close), the determination of the initial value of verifier, interior is clean, the air capacitor mismatch and fire, air condenser is rotation (slip), drive motor can work normally, the RF power output, whether all wiring for short circuit, etc. If there is a burning odor in the pairing device or the above problem cannot be solved, please contact a professional in time.
(3) The service cycle of the internal accessories of the matcher can not be clearly determined, which is related to the use environment, product treatment, proper use, etc., and the main reason may be short circuit or burn caused by impurities in the matcher.

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