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Selection Guide of vacuum plasma cleaning machine

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Published on:

19 Oct,2020

Selection Guide of vacuum plasma cleaning machine:

The plasma cleaning technology, which originated in the early 20th century, has been widely used with the rapid development of high and new technology industry, and has occupied a key position in many high and new technology fields. Plasma has a great influence on the industrial economy and human civilization, and has been the first to promote the development of the electronic information industry, especially the semiconductor and optoelectronic industries. Since plasma cleaning machine is used more and more in more and more industries, how to choose a suitable plasma cleaning machine has become a concern of people, today we will talk about how to choose a plasma vacuum plasma cleaning machine.

In the choice of plasma plasma cleaner, we mainly consider the following aspects.

The model of plasma cleaning machine is firstly determined by the cavity size. The cavity size is mainly considered from the following two aspects.

1. Workpiece size:

In general, the classification of vacuum plasma cleaning machine is mainly according to the cavity size and cavity material to divide, the choice of cavity size should first consider is the size of the workpiece, that is to say, at least to be able to put the workpiece down, if the workpiece even put can not put down, then consider other factors also does not have much meaning.

2. Production Capacity:

For products with high production capacity requirements, the cavity size must be selected according to the production capacity. The larger the cavity size is, the more products will be processed at one time. If the production capacity requirements are not high, the workpiece size will be given priority. When the workpiece can be put down, we can calculate the appropriate cavity size according to its production capacity.

The second question we need to consider is what frequency to choose for the plasma cleaner.

Frequency selection:

The frequencies commonly used today are 40KHz and 13.56MHz and 20Mhz. The self-bias voltage of 40kHz is about 1000V, that of 13.56mhz is about 250V, and that of 20MHz is even lower. These three excitation frequencies have different mechanisms. The reaction of 40kHz is physical reaction, the reaction of 13.56mhz is both physical reaction and chemical reaction, and the reaction of 20MHz is physical reaction but the main reaction is chemical reaction.

Cavity material selection:

Now commonly used cavity materials have the following: quartz cavity, stainless steel cavity, aluminum cavity, the three cavities have their own advantages, quartz cavity temperature is low, and is not easy to react. Advantages of aluminum profile: 1, aluminum profile low density, high strength, better than steel, with better mechanical processing performance. Aluminum has good conductivity, heat conduction and corrosion resistance. The compatibility of the material to the chemical reaction is good, not easy to produce metal pollution, will not produce pollution.

Vacuum pump selection:

In the end is the choice of domestic, or imported, dry pump or oil pump, single stage pump, or bipolar pump, each vacuum pump selection can be based on the actual needs of customers, here will not be repeated.

Gas path selection:

General vacuum plasma cleaning machine is a two-channel gas, but this can not meet all the processing requirements, if more reaction gas is needed, the airway should be appropriately increased, this is also according to the actual needs of users, choose multi-channel gas.

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