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Vacuum plasma equipment cavity size and intake mode effects on uniformity

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08 Sep,2020

Vacuum plasma equipment cavity size and intake mode effects on uniformity:

There are many factors that affect the uniformity of vacuum plasma cleaning machine, including the size of the cavity, the intake mode, the electrode structure, the power frequency, the gas flow rate, the power size, and so on. Today, the influence of the size of the cavity and the intake mode on the uniformity is discussed, for reference only:

1. the larger the volume of the vacuum plasma cleaning machine chamber, the more difficult to control the uniformity, especially the choice of power to be careful. Sing Fung Intelligent  Manufacturing can be customized according to customer product specifications and output vacuum plasma cleaning machine cavity, can be personalized design. However, if only 13.56mhz RF power is used for the plasma generator, it is recommended to control the RF power within 600L as far as possible. The larger the cavity, the greater the RF power required. Especially if 3000W or above power is used, it is recommended to use American AE, MKS or other imported RF power, which costs relatively high but is stable and reliable. It is recommended to use an intermediate frequency power supply of 40KHz or to control the vacuum chamber within 100L if the product is processed with high uniformity requirements.

2. Sing Fung Intelligent  Manufacturing vacuum plasma cleaning machine intake and exhaust, after testing the uniformity is relatively good. The air inlet pipe inside the cavity is usually made of aluminum tubes, which are bent and welded into a similar square structure, and holes are cut in the middle of two layers of electric plates to ensure that each layer of treatment space has an independent air inlet. The inlet structure of the large-cavity equipment will change, and the specific structure depends on the size of the cavity.

What does the above description of the effect of cavity size and intake mode on plasma uniformity inspire you? You have any views or ideas, welcome to leave a message and share with us.

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