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Vacuum low temperature plasma cleaning machine vacuum pump operation on the role of cleaning effect

Vacuum low temperature plasma cleaning machine vacuum pump operation on the role of cleaning effect

Vacuum pump is the key component of vacuum low-temperature plasma cleaning machine. Its role is to vacuum the cavity material to achieve the effect of cleaning activation or improve adhesion, but do you know how to control in the vacuum low temperature plasma cleaning machine, so as to achieve a good practical effect? The use of vacuum low-temperature plasma cleaning machine makes people have a certain understanding of product cleaning under vacuum environment. One might ask, "Why vacuum cleaning?" Because cleaning in a vacuum environment can achieve a stronger treatment effect. The product is placed in a sealed chamber for a sustained period of time. If there are small particles such as dust on the surface of the product, it will be removed according to the continuous pumping time. Duration here means that you have to keep the vacuum situation at a relatively stable vacuum state. In addition, the charging and discharging of low-temperature plasma cleaning equipment must be carried out in a stable vacuum environment. 1. Control mode of vacuum pump of small vacuum low temperature plasma cleaning machine: Most vacuum plasma cleaning machines use vacuum pumps to remove dry, gas pump chamber. Some applications are standalone and some are combined pumps. Small and medium vacuum low temperature plasma cleaning machine adopts independent pump. Its actual operation control panel key consists of keys, status indicator, passive buzzer with display light, output power controller, data display vacuum gauge, timer, knob switch and total flow of float ball. This is made up of dashboards and other components. The start and stop control of the vacuum pump is the immediate control of the DC contactor by means of a lock activated light out button. DC contactor contact point connection and disconnection control vacuum pump three-phase power supply connection and disconnection. This control method can fully take into account the control provisions of small and medium-sized plasma cleaning machine. If this method is used for automatic control, it is not only difficult, but also difficult to stipulate the precision and safety factor of control. 2. On-line and sliding door type vacuum low-temperature plasma cleaning machine vacuum pump control method: Vacuum plasma cleaners are commonly used for linear and manual doors. The vacuum pump used is 1, 2. They are actually operated and controlled by touch screen. This control mode is divided into manual control and full automatic control. 3. Manual control mode: The basic principle of most manual controls is similar to that of the test vacuum cryogenic plasma cleaner. Press the relative button to turn on the vacuum pump. The difference is that one is controlled by hardware-configured keys, while the other is controlled by virtual keys on a touch screen. The hardware of the key driver is configured as the electromagnetic coil of the automobile relay, while the soft element of the touch-screen key driver controller. Based on the logical measurement, the controller outputs the results to the output terminal of the controller, the position of the small relay of the driver, and the contact point of the small relay of the alternating vacuum pump of the driver. The contact point of the electromagnetic coil of the vacuum pump is connected and disconnected, so as to control the three-phase power supply of the vacuum pump motor. 4. Full automatic control mode: Fully automatic control refers to the automatic execution of all positions according to the order of keys. According to the standard of relative logic, the vacuum pump is started and stopped in the control step of the whole process. Whether manual control or automatic control, assuming that the vacuum degree is maintained at a certain value, steam flowmeter alone can not meet the requirements. If you can easily control the speed of the vacuum pump motor, you can easily control the vacuum degree within the set scope. If the vacuum degree of the inner cavity is less than or equal to the preset value, the speed ratio of the vacuum pump motor of the vacuum low-temperature plasma cleaning machine is completely automatically adjusted according to the value, so that the rated power of the motor is kept within the set vacuum degree range; If the vacuum degree of the inner cavity is affected by other factors, and if there is an error between the specific vacuum degree and the set vacuum degree, the program flow will automatically measure the speed of the vacuum pump and automatically adjust to maintain the set vacuum value. This control is called PID control. P is the proportion effect, I is the integral effect, and D is the differential effect. PID not only has the rapid proportion effect, but also has the error clearance effect of integral effect and the regulation effect of differentiation effect. When the error step occurs, the guidance funct

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Prospect of Plasma Etching in New Material Etching

Prospect of Plasma Etching in New Material Etching

In order to keep up with Moore's Law, IC manufacturing after 5nm is likely to abandon the traditional silicon chip process and introduce a new material, plasma etching, as an alternative. It now seems likely that 5nm will be the last stop for silicon chip technology. In fact, concerns about Moore's Law have grown in recent years as the limits on silicon chips have edged closer. To keep up with Moore's Law, transistors must shrink in size. But as the transistor size shrink, the channel between the source and the grid has been shortened, when the channel to a certain extent, the quantum tunneling effect will become very easy, in other words, even if no applied voltage, the plasma etching source and drain can be thought of as a communication, they lost the action of the switch transistor, therefore can't realize logic circuit. From now on, the 7nm process is possible, the 5nm process has certain technical support, and the 3nm process is the physical limit of the silicon semiconductor process. Therefore, the replacement material of silicon for 5nm post-plasma etching process has long attracted the attention of various commercial giants and research institutions. At present, III-V compound semiconductor, graphene, carbon nanotubes, such as the voice of the industry is high, the current general view is to use germanium in PMOS, nano NMOS with indium phosphate. For III-V compounds, IMEC(Microelectronics Research Center, whose members include Intel Corp., IBM Corp., TSMC, Samsung and other semiconductor giants) has long announced the success of the finFET compound semiconductor by integrating phosphate and arsenide imiters on a plasma etched 300mm(22nm) wafer. III-V compound semiconductors have no significant physical defects compared to other alternative materials, and similar to the current silicon chip process, many existing plasma etching technologies can be applied to new materials, so they are also considered ideal materials to continue to replace silicon beyond 5nm. Graphene material is regarded as a kind of dream, it has the very strong conductivity, can be bent, the intensity is high, these features can be used in every field, even has the potential to change the future of the world, there are many people regard it as is the future of the replace silicon semiconductor materials, graphene is known as the silicon after the "magic material" of The Times, is expected in 2028 to join technology roadmap for semiconductors (ITRS). Carbon nanotubes can improve the integration of the transistors per unit area number (such as 2.5 D, 3 D stacked package, currently in NAND, DRAM, such as storage products for many applications, but for IC chip, heat problem is bad), in the future may even have a photonic computing, quantum computing, such as reverse the computer appear Moore's law.

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The role of lithium battery plasma surface treatment equipment in the battery manufacturing process

The role of lithium battery plasma surface treatment equipment in the battery manufacturing process

Power lithium battery is a kind of commonly used lithium battery which is powered by pneumatic tool display driving force. This is a clean and environment-friendly driving power supply. In today's application scenarios, it is widely used in pure electric vehicles, electric trains, electric vehicles and so on. In recent years, with the rise of new energy vehicle sales market, the safety and reliability of power lithium battery has become a topic of concern and discussion. The reason lies not only in the fact that power lithium-ion battery is the key component of power drive system software, but also in the fact that the production process of power lithium-ion battery itself has high reliability and reliability requirements. Take automotive lithium battery as an example. What role can plasma surface treatment equipment play in the manufacturing process of power lithium battery? What can be done to help? In the manufacturing process of automotive power lithium battery, the surface treatment of plasma surface treatment equipment is generally carried out from three levels, that is, to improve the lubrication performance of the ceramic film before the positive and negative plate coating; The cleaning of the connection before lithium welding; As well as improving the surface adhesion of insulation board, end board, PET plastic film and other metal composite materials and their insulation materials before external adhesion of them and their lithium battery components. Next, I'll summarize briefly, and then go into more detail one by one. 1. Plasma surface treatment equipment to solve the problem of positive and negative two-stage coating in front of ceramic membrane plasma cleaning machine: The positive and negative grades of the automotive power lithium battery are made from the positive grades of the ceramic film and the cathode materials of the battery. Compared with ethanol and other aqueous solution cleaning, plasma cleaning machine treatment will not damage the raw material, and can remove the organic matter on the surface of the raw material, improve the lubrication of the film surface, improve the uniformity of the coating, heat resistance and safety factor. 2. Cleaning treatment of plasma surface treatment equipment before welding: The lithium connector is actually the part of the metal strip that correctly guides the positive and negative stages of the rechargeable battery. It is point contact during battery charging and discharging. Whether the surface of the connection is cleaned or not will do great harm to the reliability and performance of the electrical connection. Before electric welding, plasma cleaning machine can remove organic matter, particles and other residues on the weld surface, so that the weld surface becomes uneven, so as to improve the quality of welding. 3. Plasma surface treatment equipment for the treatment of lithium battery modules: Lithium-ion battery assembly is a process in which several rechargeable battery modules are connected in series into a series of parallel circuits to produce a lithium battery pack. In order to keep the power line and insulation layer safe, in this process, it is necessary to affixed external rechargeable batteries to improve the safety factor of the application. Before that, please use the plasma cleaning machine to clean the insulation board, end board, PET film and other parts. Isoionization treatment can thoroughly clean the dirt surface, make the surface become not smooth, and improve the adhesion of strong glue or strong glue. After years of development trend, China's power lithium battery industry chain has begun to take shape, but there are still some problems, such as technical strength and R&D ability is not strong, can not be fully utilized. It is believed that with the improvement of technical standards, the requirements of plasma surface treatment equipment will be put forward more detailed and diversified provisions.

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PTFE plasma cleaning machine processing to improve the material surface bonding ability

PTFE plasma cleaning machine processing to improve the material surface bonding ability

1. Plasma cleaning machine low temperature plasma etching: During the entire process of low temperature plasma etching, the etched object changes into the gas phase. Using a mechanical pump to drain the excess product and continuously cover the surface with fresh gas, the etched part will not be covered by the material (for example, the semiconductor materials industry uses chromium as the covering material). Plasma methods can also be used to etch plastic surfaces, and compounds can be ash. As the preparation treatment method of plastic packaging in printing bonding, such as POM, PPS, PTFE, etching method is very necessary, low temperature plasma cleaning machine can significantly increase the wetting area to improve the ability of material surface bonding. 2. Plastic, laminated glass and porcelain surface treatment and cleaning: Plastic, laminated glass and porcelain are commonly used for daily use because of their excellent performance and low price. Fluoroplastics have excellent organic chemical reliability, excellent dielectric properties, extremely low friction resistance and self-lubricating bearing effect, so in some special industries has an important main use. However, during the entire release process of such materials, it is difficult to avoid the problem of weak bonding ability between the same materials or with other materials. Therefore, the reasons for the non-adhesion of the polymer materials and the surface solutions have been discussed. Ion treatment does not damage the sample easily. In addition, it can solve all surface problems very evenly, and it is not easy to cause harmful substances. Hollow products can also be processed, with environmental protection, the indoor space required for work is small, low cost. The practical effect of simple plasma solution can be evaluated according to hydrophilicity, and whether the surface of the specimen after solution is completely wet. 3. Low-temperature plasma coating: The pooling process involves two gases that come into the reaction chamber during the coating and come together in the plasma environment. This use requires more stringent cleaning than plasma surface cleaning. The coating is easy to maintain and is only 1 micron. Common standards include water coatings similar to PTFE material coatings, the purpose of which is to avoid crossing with the hydrophilic coating. 4. Oil removal and purification on the surface of metal materials: Usually, the surface layer of metal material is organic chemical layer and hydroxide layer, such as grease, vegetable grease and so on. In the past, magnetron magnetron sputtering, painting, bonding, arc welding, tin welding and PVD, CVD and other coating, it is necessary to use such ion cleaning machine, in order to get clean and non-reducing surface layer. 5, PTFE etching ash removal: PTFE cannot be packaged, printed or pasted without proper treatment. The use of alkali metals is known to increase suction, but this method is difficult to master and the solution can be harmful. The use of plasma cleaning machine can not only maintain the ecological environment, but also obtain a very good practical effect. PTFE mixtures must be handled with care to prevent excessive filler exposure. Plasma maximizes the benefits of the surface, allowing plastic to be glued together for packaging and printing.

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Small vacuum plasma surface treatment machine brand seal parts importance

Small vacuum plasma surface treatment machine brand seal parts importance

When we type vacuum plasma surface treatment machine brand for quality and reliability evaluation, or all of its compliance with standards, typically the first thing to note is the equipment of many key components, such as vacuum pump, plasma generator, and other key components, but in fact there are some incorrect selection or improper selection of widgets or inside the equipment, the common failures appeared for the actual operation of the vacuum plasma surface treatment machine is also very important. Today, we will first introduce the necessity of vacuum plasma cleaning machine parts sealing in detail. Plasma cleaning machine vacuum part, seal key for sealing. Incorrect selection of the sealing ring will damage the operation function of the equipment. At present, there are three kinds of seals on the market, one is the O-ring, one is the pipe support point seal, the other is the seal ring. In which part of the vacuum plasma cleaning machine is the sealing device applied? 1.O type ring small vacuum plasma surface processor brand application: The O-ring consists of a low friction filled polytetrafluoroethylene (PTFE) ring and an O-shaped vulcanized rubber seal ring. Type O, prestressing force can provide adequate seal vacuum plasma surface treatment machine is the key for vacuum cavity connected with other components of the plasma cleaning machine, vacuum vacuum plasma cleaners, and sealing function, such as vacuum chamber and vacuum sealing, electric level between the door and vacuum chamber between the seal and vacuum chamber and vacuum the seal between the sealing hole in the middle. 2. Tube rack seal for vacuum plasma plasma surface treatment machine: The main advantage of pipe support seals is that they are easy to install and do not require any special tools. Good sealing; In the vacuum plasma cleaning machine, the key is to connect in the middle of the vacuum tube. Based on the extruded vacuum clamp, the supporting point in the pipe is sealed and clamped to achieve the actual sealing effect. Use a common seal in the middle of the pipe. 3. Gasket for vacuum plasma cleaning machine. Seals are the key parts used in industrial equipment, used to connect the parts of machinery equipment to the mechanical parts. The acid-resistant alkali stone rubber gasket commonly used in vacuum plasma surface treatment machine is made of high quality stone wool. Made of chemical fiber, acid and alkali resistant chemical fiber, fillers, additives and other materials. It has good wear resistance, temperature resistance and sealing property. It is mainly used for vacuum pump shell of vacuum plasma cleaning machine.

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How to complete the display of air pressure alarm of plasma surface treatment machine

How to complete the display of air pressure alarm of plasma surface treatment machine

The reliability and size of the gas pressure in use can be realized by the pressure controller. So plasma surface processor generally how to complete the pressure display and pressure alarm? Today, I'd like to share some knowledge with you. 1. Air pressure visualization: Pressure can be observed in many ways. In general, it is an effective method to install a relief decompression meter in the air passage or part of the air passage. This method is used to display the pressure information of the gas channel on the plasma technology cleaning machine. Generally, the pressure gauge is installed in the embedded hole of the pressure regulating valve. The advantage is that the pressure can be checked immediately when the pressure is adjusted. In addition to the installation of pressure gauges, pressure sensors can also be installed to complete the air pressure display, but the pressure sensor is generally equipped with a display information control module or module. The advantage of this method is that the information can be displayed instantly on the operation panel of the plasma cleaning machine, but it will increase the complexity of programming, and the cost is very high. Therefore, except for special requirements, it is rarely used for plasma cleaning technology. 2. Low pressure gas alarm system: For a plasma surface processor, just looking at the air pressure is not enough. In order to ensure the normal operation of all mechanical equipment, in order to ensure the reliability of the main parameters in the machining process, it is necessary to consider the pneumatic control problem in the design scheme. Because the pressure controller and relief valve are installed on the gas safety channel of the low-temperature plasma cleaner, the larger pressure input to the subsequent gas is limited to a certain range, so the high-pressure monitoring and alarm can be generally ignored, and only the low-pressure alarm maintenance can be carried out. Generally, two methods are used to realize the low pressure alarm of plasma surface processor, namely, the pressure gauge with data signal output and the diaphragm pressure power switch. Pressure gauge used in plasma cleaning machine, its data signal output can be divided into compass type and data display type, in specific applications have been used. The compass manometer has a data signal output and is a mechanical system that is not susceptible to high frequency interference, so it is widely used. When the air pressure is too high in a moment, it will automatically turn off without any alarm signal. When the instantaneous pressure is lower than the alarm display lamp, the display lamp is on, and the internal power supply circuit is converted to complete the alarm output. The data pressure gauge used in the plasma cleaning machine is an electronic digital pressure power switch, which can complete the real-time data display of air pressure and the output of pressure alarm. Both the instantaneous pressure and the set low pressure display information in the form of data, which has strong visual effectiveness and can reasonably prevent misunderstanding. By mounting the bracket, the data pressure gauge can also be more easily installed in the machine equipment server cabinet. Compared with the needle pressure gauge, its application coordination ability is stronger. The disadvantage of this pressure gauge is that if the operation of the plasma cleaning process is improper, the use of sensors and digital integrated circuit to complete the pressure gauge display information, it is easy to cause high frequency signal interference difficulties. Digital pressure gauges using diaphragm pressure power switch is rarely used at present, the key is used in some plasma surface treatment machines. The pulsed decompression power switch is also a pure mechanical system, which is not susceptible to high-frequency interference and can adjust the pressure according to specific needs. When the air pressure reaches a predetermined value, the internal delay relay closes. Delay relays can be used to complete machine and equipment maintenance and output alarm. In practical application, the delay relay is usually connected with the starting power supply of the plasma surface processor to prevent the damage caused by starting the plasma generator when the air pressure and cyclone are insufficient.

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