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The application of plasma cleaner technology in semiconductor wafer cleaning has become a mature process

The application of plasma cleaner technology in semiconductor wafer cleaning has become a mature process

The application of plasma cleaner technology in semiconductor wafer cleaning has become a mature process: In the semiconductor production process, almost every process needs to be cleaned, and the quality of wafer cleaning has a serious impact on device performance. It is precisely because wafer cleaning is an important and frequent process in the semiconductor manufacturing process, and its process quality will directly affect the yield, performance and reliability of the device, so major domestic and foreign companies, research institutions and other research on the cleaning process. It's been going on and on. As an advanced dry cleaning technology, plasma cleaning machine has the characteristics of green and environmental protection. With the rapid development of the microelectronics industry, plasma cleaning machine technology is also used more and more in the semiconductor industry. With the continuous development of semiconductor technology, the requirements for process technology are getting higher and higher, especially for the surface quality of semiconductor wafers. The main reason is that the contamination of particles and metal impurities on the surface of wafers will seriously affect In terms of device quality and yield, in the current integrated circuit production, more than 50% of the material is still lost due to the contamination problem on the wafer surface. Application of plasma cleaner in semiconductor wafer cleaning process. Plasma cleaning has the problems of simple process, convenient operation, no waste disposal and environmental pollution. But it cannot remove carbon and other non-volatile metal or metal oxide impurities. Plasma cleaning machines are often used in the removal process of photoresist. A small amount of oxygen is introduced into the plasma reaction system, and under the action of a strong electric field, the oxygen generates plasma, and the photoresist is rapidly oxidized into a volatile gaseous substance. was taken away. In the degumming process, the plasma cleaning machine has the advantages of convenient operation, high efficiency, clean surface, no scratches, and it is beneficial to ensure the quality of the product. Moreover, it does not use acids, alkalis and organic solvents as cleaning raw materials, and does not pollute the environment. Plasma treatment technology is an irreplaceable mature process, no matter in the implantation of chip source ions, or the coating of wafers, or what our low-temperature plasma surface treatment equipment can achieve: removal of oxidation on the surface of wafers Ultra-purification treatment and surface activation of film, organic matter, demasking, etc., improve the wettability of wafer surface. The application scope of plasma cleaning machine technology mainly includes medical equipment, sterilization, disinfection, glue box, optical cable factory, cable factory, university laboratory cleaning experimental tools, shoe soles and shoe uppers are bonded, automotive glass coating film before. Cleaning, plasma treatment to make the bond stronger, bonding work on car lights, bonding of glass and iron, textiles, plastics, paper, printing and optoelectronic materials or metals, etc., can all be treated by plasma.

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Hydrogen plasma treatment technology of plasma cleaner removes carbon and oxygen from SiC surface contaminants

Hydrogen plasma treatment technology of plasma cleaner removes carbon and oxygen from SiC surface contaminants

Hydrogen plasma treatment technology of plasma cleaner removes carbon and oxygen from SiC surface contaminants: SiC material is the third-generation semiconductor material, which has the characteristics of high critical breakdown electric field, high thermal conductivity, and high carrier saturation drift speed. The excellent performance of high power and low loss achieved is the frontier direction of high-end semiconductor power devices. However, the conventional wet-processed SiC surface has some disadvantages such as residual C impurities and the surface is easily oxidized, which makes it difficult to form an excellent ohmic contact and a low-interface MOS structure on SiC, which seriously affects the performance of power devices. performance. The plasma cleaner plasma enhances metal organics, and the chemical vapor deposition system can generate low-energy ions and high-ionization, high-concentration, high-activation, and high-purity hydrogen plasma at low temperatures, making it possible to remove C or OH- and other impurities at low temperatures. From the RHEED images after wet cleaning and plasma cleaning by plasma cleaning machine, we found that the wet-processed SiC surface was dotted, which indicated that the wet-processed SiC surface was uneven and had local protrusions. The plasma-processed RHEED image is streaky, indicating a very flat surface.

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Research on friction-improving fusion wear properties of plasma sprayed molybdenum-based alloy coatings

Research on friction-improving fusion wear properties of plasma sprayed molybdenum-based alloy coatings

Research on friction-improving fusion wear properties of plasma sprayed molybdenum-based alloy coatings: In mechanical composite components, as long as there is movement, there will inevitably be friction and wear problems between matching parts. Due to the difference in the working conditions of the friction pair and the complexity of the working conditions, the consequences lead to the intricate damage process of the friction surface, and there are many forms of damage. Surface damage caused by friction, a form of wear, can be roughly divided into fusion wear, abrasive wear, corrosion wear, and contact fatigue wear. Because of the fusion wear, most of the wear occurs in the initial running-in process of the friction pair, and its occurrence often destroys the working surface of the matching parts, making the entire unit unable to operate normally. Therefore, in all forms of wear, the damage it brings is particularly prominent. In the mechanical movement, the working conditions of fusion wear of the friction pair are as follows: 1. When there is lubricating oil, the cylinder liner and piston ring in the diesel engine work under the condition of lubricating oil. Due to the use of supercharging technology, the power of the diesel engine is improved, so the heat of the cylinder liner and the piston ring is increased. The load and mechanical load also increase, so the phenomenon of "pulling the cylinder" and the fusion and wear of the piston ring continue to occur. 2. The piston rod in the reciprocating cycle compressor that appears in the working conditions without direct oil supply and lubrication, it not only needs to transmit power, but also bear the seal, and it works without direct oil supply and lubrication, so it is extremely Easy to produce fusion wear. There are many factors that cause friction pair wear, and providing good lubrication conditions is an important factor in reducing wear. Theoretically speaking, under the protection of continuous oil film or grinding medium, the pair of parts that make up the friction pair will hardly wear out. However, under actual working conditions, this is often difficult to achieve due to the combined influence of various factors. Therefore, if the lubricating film is destroyed, the matching parts will be in contact with each other between metals. At this time, under the working conditions of high speed, high temperature and high pressure, extremely high frictional heat is generated in the tiny area of ​​the contact part instantly, which makes the contact between the materials. Melt adhesion occurs to form a source of failure. At the same time, under the high-speed movement of the parts, the source of damage expands, and the adhesive part is torn or peeled off in the form of cracked fragments, and embedded between the friction pairs. These hard particles form a cutting action between the two sliding surfaces, which destroys the friction surface and causes fusion wear. This process resulting from fusion wear is, in short, "severe damage characterized by localized fusion of two sliding surfaces". Therefore, an effective way to improve fusion wear must meet the following conditions: 1. Make the friction surface have unique oil storage characteristics to make up for the lack of lubricating oil before the critical lubrication state occurs and avoid the emergence of the critical lubrication state. 2. Improve the high temperature resistance of the working surface of the parts and avoid the influence of instantaneous frictional heat. The sub-alloyed molybdenum-based alloy coating obtained by the plasma spraying process is one of the effective ways to solve the fusion wear in the above-mentioned mechanism. In addition to solid, liquid, and gaseous states, plasma is called the fourth state of matter. It is a special "gas" composed of positive and negative charged particles in a certain proportion by ionization of a certain gas under the action of an electric field. Due to mechanical compression, magnetic shrinkage and thermal shrinkage, the plasma energy is highly concentrated. Because the spraying is mainly based on powder materials, various sub-alloy coatings with different performance requirements can be prepared through the mixing ratio of different powder materials. Plasma spraying technology has become a versatile surface treatment process and is increasingly used to prepare surface coatings for wear resistance, scratch resistance, electrical conduction, thermal insulation, insulation, corrosion protection and other special purposes. Generally, inert gas argon or supplemented with argon, nitrogen or helium is used. This facilitates plasma technology to guarantee specific properties of the coating material. In addition, since the base material will not be directly heated during spraying, problems such as deformation caused by the heating of the workpiece are also avoided.

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Small vacuum plasma surface treatment machine sealing components and air pressure show the importance

Small vacuum plasma surface treatment machine sealing components and air pressure show the importance

Small vacuum plasma plasma surface treatment machine sealing components and air pressure show the importance: When evaluating the quality and reliability of a small vacuum plasma surface treatment machine and judging whether it meets the standards mentioned by everyone, one thing to pay attention to is many key components of the equipment, such as vacuum pumps, plasma generators, etc. , but there are actually some wrong choices or improper selection of small parts inside the equipment or common failures, which are also very important for the actual operation of the small vacuum plasma surface treatment machine. There are many ways to observe air pressure. It is an effective method to install pressure relief devices in the air circuit or part of the air circuit. Using this method, the display information of airway pressure is completed on the plasma cleaning machine. Generally, the pressure gauge is installed in the buried hole of the pressure regulating valve. It has the advantage that pressure can be observed immediately as it is being adjusted. In addition to installing a pressure gauge, a pressure sensor can also be installed to complete the air pressure display, but the pressure sensor is generally equipped with a control module or module to display the information. The advantage of this method is that the information on the operation panel can be displayed immediately on a small vacuum plasma surface treatment machine, but the complexity of programming is increased and the cost is high. Therefore, except for special requirements, it is rarely used in plasma cleaning processes. This paper first introduces the necessity of vacuum plasma cleaning machine to seal the parts in detail. The vacuum part of the small vacuum plasma plasma surface treatment machine is sealed with a sealing key. Improper use of the seals can impair the functioning of the equipment. There are generally three types of sealing rings currently on the market, one is an O-ring, the other is a branch pipe support point sealing ring, and the other is a sealing ring. The O-ring is composed of a low-friction filled polytetrafluoroethylene (PTFE) ring and a vulcanized rubber sealing ring. The type can provide sufficient sealing preloading capacity. The key of the vacuum plasma cleaning machine is that the vacuum chamber of the vacuum plasma cleaning machine is connected with other components, and has sealing functions, such as the sealing between the vacuum chamber and the vacuum door, the electrical level and the vacuum Sealing between cavities, sealing between vacuum chambers and sealing holes in the middle of vacuum tubes, etc. With plasma surface treatments, air pressure alone is not enough. In order to ensure the normal operation of all the mechanical equipment and the reliability of the main parameters of the processing technology, the influence of pneumatic manipulation must be considered in the design scheme. Because the pressure controller, overflow valve, etc. are installed on the safety air passage of the low-temperature plasma dust removal device, the larger pressure of the exhaust gas after the input is limited to a certain range, so the high-pressure monitoring alarm can generally be ignored, and only the low-pressure Alarm maintenance. The main advantage of the pipeline support point seal is that the installation is relatively simple and convenient, and does not require any special tools. Good air tightness; in vacuum plasma cleaners, the key is to connect to the middle of the vacuum tube. The extruded vacuum fixture is used to clamp and seal the support points in the pipeline to achieve the actual effect of sealing. The middle of the pipeline adopts a general sealing method. Usually two methods are used to realize the low pressure alarm of the plasma surface treatment machine, that is, output data through the pressure gauge and the diaphragm pressure power switch. The data signal output of the pressure gauge used in the plasma cleaning machine can be divided into two types: compass output and data display output, and has been verified in practical applications. Since the compass manometer has a data signal output, it is a mechanical system with less high-frequency interference, so it is widely used. When the instantaneous air pressure is too high, it will automatically turn off without any alarm signal. When the instantaneous air pressure is lower than the indicator light of the alarm, the alarm is on, and the internal power circuit is converted to complete the alarm output. The sealing ring is a key part of industrial equipment, which is used to connect various parts of mechanical equipment to mechanical parts. High-quality asbestos are used to make acid and alkali resistant asbestos, which are used in small vacuum plasma surface treatment machines. It is made of chemical fibers, acid and alkali resistant chemical fibers, fillers, additives, etc. Wear resistance, temperature resistance, good sealing performance, mainly used

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The plasma cleaning technology of low temperature plasma surface treatment equipment is in line with the application in the field of materials

The plasma cleaning technology of low temperature plasma surface treatment equipment is in line with the application in the field of materials

The plasma cleaning technology of low temperature plasma surface treatment equipment is in line with the application in the field of materials: Since the advent of plasma cleaning technology, with the rapid development of electronics and other industries, its application range has gradually expanded, and it is used for activation etching and plasma cleaning to improve the bonding performance of adhesives. At present, plasma cleaning technology has been widely used in the semiconductor and optoelectronic industries. The main application fields include low-temperature plasma surface treatment equipment such as integrated circuits, semiconductors, and medical treatment. It is mainly composed of plasma generators, gas pipelines and low-temperature plasma nozzles. When the arc discharges, the plasma generator generates high-voltage and high-frequency kinetic energy, and thus the plasma is generated. This plasma technology is excited and controlled in the nozzle, through which the gas, such as air, is sprayed onto the surface of the material. When plasma technology comes into contact with the surface of a material, physical changes and chemical reactions occur. The treated surface has formed a high-density chemical cross-linked layer, or has the effect of promoting the adhesion of various architectural coatings due to the introduction of methyl and carboxyl groups, and has been promoted in coating adhesion and application. Using plasma technology to treat the surface can also get a very thin tough coating, so that the surface has good adhesion, coating and printing properties. The addition of functional components can improve adhesion without other industrial auxiliary equipment. Low temperature plasma surface treatment equipment is suitable for daily necessities and electronic products, furniture surface treatment, surface treatment before printing, hard coating, and no paint peeling after printing. The use of low-temperature plasma surface treatment equipment to modify the metal surface layer can improve the corrosion resistance of the metal surface, improve the bonding performance of the metal surface, and improve the strength and wear resistance of metal materials; surface treatment of vulcanized rubber and plastic industries; Treat the laminated glass to make it more waterproof, and can print, glue, glue and other sound insulation and noise reduction; bond glass fiber reinforced plastic products for pretreatment and other ionization; laboratory cell culture dishes are used for hydrophilic, bonding Sexual treatment, the cells can be uniform after generation; the display is crimped for pretreatment, the circuit board on the LCD soft film is surface treated, and the hard part is bonded for pretreatment to ensure the firm bonding of the mobile phone case and the notebook case. The frame of the mobile phone and the notebook computer is not easy to fall off when the paint is painted, the shell is glued together, the paint of the shell is not easy to fall off, and the text is not easy to fade. The use of plasma cleaning technology can effectively avoid the damage of chemical solvents to the properties of the material. When cleaning the surface of the material, a variety of active functional groups can be introduced to increase the surface roughness of the fiber, improve the surface free energy of the fiber, and effectively strengthen the resin and the resin. Binding of fibers. The comprehensive properties of composite materials are improved by the bonding between fiber interfaces. The research results show that the use of plasma cleaning technology can effectively improve the interlaminar shear strength of aramid fibers under appropriate conditions, and can significantly improve the interfacial properties of the resin. The low-temperature plasma pretreatment technology is used to carry out surface printing treatment on the printing in the plastic surface treatment tube, beverage bottle caps, and skin care product packaging bottles, surface bonding treatment for small toys, and bonding treatment for shoe uppers to ensure that the super glue does not open. , using low-temperature plasma surface treatment equipment for the printing and dyeing industry. As a biotechnology medical catheter, the application of low temperature plasma surface treatment machine in medical equipment makes the combination after surface treatment more closely. The surface treatment of artificial organ materials can take into account the hydrophilicity of compatible medical consumables. Disinfection and sterilization of medical machinery. In view of the unsatisfactory effect of resin on fiber impregnation in the LCM process, there are holes in the product and surface dry spots, etc., plasma cleaning technology can be considered to improve the physical and chemical properties of the fiber surface and improve the surface quality of preformed fibers. Using the same process conditions (pressure field, temperature field, etc.), the resin can more fu

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Plasma etching machine technology PTFE plasma hole film interface adhesion performance Surface treatmen

Plasma etching machine technology PTFE plasma hole film interface adhesion performance Surface treatmen

Plasma etching machine technology PTFE plasma hole film interface adhesion performance Surface treatment:         PTFE microporous membrane has stable chemical properties, high temperature resistance, corrosion resistance, excellent water resistance and oleophobicity, and has good filtration performance for high temperature, high humidity, high corrosion and machine fluids in special gases, and can be widely used. It is used in dust removal and filtration in metallurgy, chemical industry, coal, cement and other industries. It is a film material of high temperature resistant composite filter material. However, its extremely low surface activity and outstanding non-stick properties make it difficult to compound with substrates, thus limiting its application. Plasma etching machine is also known as plasma etching machine, plasma plane etching machine, plasma surface treatment instrument, plasma cleaning system, etc. Plasma etching machine technology is a common form of dry etching. The principle is that the gas exposed to the electron region forms plasma, generates plasma and releases gas composed of high-energy electrons to form plasma or ions. When bulk atoms are accelerated by an electric field, the force released is sufficient to cling to the material or etch the surface, combining it with the surface driving force. To a certain extent, plasma cleaning is actually a minor phenomenon in the plasma etching process. Dry etching processing equipment includes reaction chamber, power supply, vacuum and other parts. The workpiece is sent to the reaction chamber, and the gases are introduced into the plasma and exchanged. The plasma etching process is essentially an active plasma process. Recently, a shelf form has appeared in the reaction chamber, which the user can move flexibly to configure the appropriate plasma etching method: reactive plasma (RIE), downstream plasma (downstream) and direct plasma (directionplasma) . The power of plasma surface treatment of plasma etching machine technology is not as large as possible. At lower power, the shear strength of the treated film increases with the increase of power, and the strength gradually decreases after reaching the peak value. Inductively Coupled Plasma Etching (ICPE) is a combination of chemical and physical processes. Its basic principle is: under low pressure, the ICP radio frequency power supply is output to the annular coupling coil, and through the coupling glow discharge, the mixed etching gas generates high-density plasma through the coupling glow discharge. The surface of the substrate is bombarded, the chemical bonds of the semiconductor material in the pattern area of ​​the substrate are broken, and volatile substances are generated with the etching gas, which separates the gas from the substrate and is evacuated from the vacuum tube. Under the same conditions, oxygen plasma treatment is more effective than nitrogen plasma treatment. If etching is required, as well as removal of dirt, scum, surface treatment, plasma polymerization, plasma ashing or any other etching application after etching, we can produce safe and reliable plasma etcher technology according to customer requirements. Our company has both traditional plasma etching system and reactive ion etching system, can produce series products, and can also customize special systems for customers. We can provide fast/high quality etch that provides the required uniformity. With the prolongation of the treatment time, the contact angle of the film surface decreased, but within a certain period of time, the contact angle hardly changed. Plasma treatment can be used for a variety of substrates, and complex geometries can also be plasma activated, plasma cleaned, plasma coated, etc. Plasma processing has a low thermal and mechanical load, so low-pressure plasma can also process sensitive materials. The above results show that the use of plasma surface treatment of PTFE has better viscosity, and it is necessary to continuously adjust various treatment parameters to obtain a good treatment process. CRF Chengfengzhi plasma cleaning machine is simple to operate, can set multiple experimental parameters, and can also Store a variety of process parameters, which is very helpful for exploring process parameters. Typical applications of plasma etcher technology are: semiconductor/integrated circuits; gallium nitride; aluminum nitride/gallium nitride; gallium arsenide/aluminum gallium arsenide; gallium arsenide; /InAlAs); silicon; silicon germanium; silicon silicide ceramics (Si3N4); silicon hydrogen bromide; zinc selenide (ZnSe); aluminum; chromium; platinum; molybdenum; niobium; indium; tungsten; indium tin oxide; indium titanium lead acid; plastic/polymer material; polytetrafluoroethylene (PTFE); polyoxymethylene (POM); polybenzimidazole (PBI); polyetheretherketone (PEEK); polyamide (PFA); polyamide (PFA) ; Polyamide etc.

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