图片名称

Metal plasma surface treatment of metal surface treatment applications

Plasma surface processor (PSMP) USES energetic particles and active particles in the plasma to bombish or activate the metal surface in order to remove dirt. No chemical reagent is used in the plasma cleaning process, so it will not cause secondary pollution. The cleaning equipment can be reused, so the operating cost of the equipment is low, and the operation is simple and flexible, which can realize the overall or partial cleaning of the metal surface and the complex structure. The surface properties of some plasmas after cleaning can also be improved, which is beneficial to the application of metal processing. Principle of plasma surface treatment: In addition to gas molecules, electrons and ions, plasma contains a large number of neutral atoms, atomic groups, free radicals and the light emitted by the plasma. Plasma cleaning is a process in which ions, electrons, excited atoms, free radicals and their activation reactions with pollutant molecules on the cleaned surface are respectively used to remove pollutants. The role of electrons in cleaning metal surfaces: Electrons in the plasma collide with atoms or molecules to form excited neutral atoms or groups of atoms (also known as free radicals) that can react with contaminant molecules in an activation reaction that removes the contaminant from the metal surface. In the process of electron transport to the surface cleaning area, it will collide with the adsorbed pollutant molecules on the surface to promote the decomposition of pollutant molecules and generate active free radicals, thus triggering the further activation reaction of pollutant molecules. In addition, electrons, which have very little mass, move faster than ions, so they reach the surface earlier than ions and make the surface negatively charged, triggering further activation reactions. The role of ions in cleaning metal surfaces: The cation is accelerated by the surface of the negatively charged object to obtain a large amount of kinetic energy. In this process, a pure physical collision occurs, which makes the dirt attached to the surface of the object be stripped off. At the same time, the impact of the cation also increases the chance of the activation reaction of pollutant molecules on the surface of the object. The role of free radicals in cleaning metal surfaces: In general, in plasma, the number of free radicals is more than that of ions, which is electrically neutral, has a long life, and has a large energy. Cleaning process, the pollutant molecules on the surface to be quite easy to combine with high-energy radicals, generate new free radical, these free radicals are also in high energy condition, and unstable, easily autolysis, and translated into smaller molecules that generate new free radicals at the same time, this process will continue, until it is broken into stable, volatile small molecules, and finally make the pollutants from the metal surface, in this process, the main role of free radicals is characterized by activation of energy transfer, in the process of free radicals and surface dirt molecules, there will be a lot of binding energy released, The released energy ACTS as a driving force for the activation reaction of surface dirt molecules, which is conducive to the thorough removal of pollutants under the action of plasma activation. The role of emitting light in the process of cleaning metal surfaces: When the plasma is generated, it emits light, which has high light energy and great penetration. Under the action of light, molecular bonds of dirt molecules on the metal surface break, which is beneficial to promote the further activation of pollutant molecules and make them remove the dirt on the metal surface. To sum up, the plasma surface treatment machine rely mainly on the plasma electrons, ions and excited atoms and free radicals and other reactive ion activation, gradually break down the large molecules of organic pollutants on the metal surface, and finally form stable volatile simple small molecules, will stick to the surface of the dirt from the surface completely separated. The adhesion and wettability of metal surface can be greatly improved by plasma cleaning, and the improvement of these properties is of great help to the further surface treatment of metal materials. With the rapid development of high and new technology industry, plasma cleaning technology has been more and more widely used in electronics, semiconductor, photoelectric and other high and new technology fields.

MORE +

The influence factors of plasma cleaning effect

1. Principle and Implementation Method: Plasma cleaning can remove surface stains by means of physical shock (such as argon plasma) or chemical reaction (oxygen plasma) caused by the impact of high-energy particles in a specific material plasma on the surface of the object that needs cleaning. At present, most plasma cleaning systems obtain the plasma by lowering the reaction chamber pressure to 100Pa, then pumping in the appropriate gas at a certain speed and powering up. 2. Main factors affecting the cleaning effect: (1) Influence of electrode on plasma cleaning effect: The design of the electrode has a significant influence on the plasma cleaning effect, mainly including the material, layout and size of the electrode. For inner electrode plasma cleaning system, because the electrode exposed in plasma, some materials of electrode are some plasma etching or sputtering phenomenon occurs, causing unnecessary pollution and lead to changes in the size of the electrode, which affect plasma cleaning has a great influence on the speed and uniformity, the small electrode spacing can limit plasma in a small area to get a high density plasma, achieve faster to clean. With the increase of spacing, the cleaning speed decreases gradually but the uniformity increases gradually. The size of the electrode usually determines the overall capacity of the plasma system. In the plasma cleaning system with parallel electrode distribution, the electrode is usually used as a tray. The larger electrode can clean more components at one time to improve the operating efficiency of the equipment. (2) Influence of working pressure on plasma cleaning effect: Work pressure is one of the important parameters of plasma cleaning, the increase of the pressure means the increase of plasma density and the average energy of the particles is reduced, the plasma chemical reaction as the leading, enhanced density plasma system can obviously improve the cleaning speed, and physical bombardment dominate the effect of plasma cleaning system is not obvious. In addition, changes in pressure may cause changes in plasma cleaning reaction mechanism. For example, the CF4/O2 plasma used in silicon wafer etching process plays a dominant role when the pressure is low, while with the increase of pressure, the chemical etching is constantly strengthened and gradually plays a dominant role. (3) Influence of power and frequency on plasma cleaning effect: The power of the power source influences all plasma parameters, such as the temperature of the electrode, the self-bias generated by the plasma and the cleaning efficiency. With the increase of the output power, the plasma cleaning speed gradually strengthened and stabilized at a peak value, while the self-bias voltage increased with the increase of the output power. Since the power range is basically constant, frequency is the key parameter that affects the plasma self-bias. With the increase of frequency, the self-bias decreases gradually. In addition, with the increase of frequency, the density of electrons in the plasma increases gradually, while the average energy of particles decreases gradually. (4) Influence of working gas selection on plasma cleaning effect: The selection of process gas is a key step in the design of plasma cleaning process. Although most of the gas or gas mixture can remove pollutants in many cases, the cleaning speed can vary several times or even dozens of times. For example, adding different proportions of sulfur fluoride (SF6) in oxygen (O2) to clean plexiglass as a process gas can greatly improve the cleaning speed.

MORE +

How plasma surface treatment works-CRF PLASMA

A plasma is a collection of electrically neutral substances composed of ions, electrons and neutral particles. During plasma surface treatment, the plasma transmits its energy to the molecules and atoms on the surface of the material when it collides with the surface of the material, resulting in a series of physical and chemical reactions. By injecting particles or gases into the surface of the material, it can cause collision, scattering, excitation, rearrangement, isomerization, defect, crystallization and amorphous, so as to change the surface properties of the material. 1. Etching effect of plasma surface treatment on material surface: Under physical action, a large number of ions, excited molecules, free radicals and other active particles in the plasma will act on the surface of solid samples, which can remove the original pollutants and impurities on the surface. This process also produces etching, which can make the surface of the sample rough, forming many tiny pits, increasing the roughness ratio of the sample surface, and improving the adhesion and wetting properties of the solid surface. 2. Effects of plasma surface treatment on activation bond energy and cross-linking: The particle energy in the plasma is between 0 and 20eV, while most of the bond energy in the polymer is between 0 and 10eV. Therefore, after plasma surface treatment ACTS on the solid surface, the original chemical bonds on the solid surface can be broken, creating a new reaction atmosphere. Free radicals in the plasma can form a network crosslinking structure with these bonds, which greatly activates the surface activity. 3. Plasma surface treatment can form new functional groups: When plasma surface treatment is carried out, introducing reactive gas into discharge gas will produce complex chemical reactions on the surface of activated material. In this process, new functional groups can be introduced into the material surface, such as hydrocarbon group, amino group, carboxyl group, etc. These new functional groups are some active groups, which can significantly improve the activity of the material surface. The principle of plasma surface treatment is mainly to use the active particles in the plasma for "activation", so as to achieve the treatment effect of removing the pollutants on the material surface. Plasma surface treatment usually involves the following reaction processes: (1) Firstly, the inorganic gas is excited into a plasma state; (2) The gaseous phase substances are adsorbed on the solid surface through the action; (3) The adsorbed substances react with molecules on the solid surface to form product molecules; (4) The product molecules are then analyzed to form the gas phase, so as to achieve the effect of the reaction residue off the surface.

MORE +

Vacuum plasma cleaning machine maintenance and use requirements

As the saying goes, sharpening a knife never misses a woodcutter. Good use of a good tool can often make the work more effective. Of course, the machine is also good to maintain, so below to share some of the vacuum plasma cleaning machine maintenance matters. Vacuum plasma cleaning machine maintenance: Note: All relevant safety precautions should be taken prior to the commencement of cleaning machine maintenance or repair, not limited to the contents mentioned here. I. Premise Work: 1. Turn off the power switch of the equipment and disconnect the main power protector. 2. Shut off all gas. 3. Prepare the necessary toolbox. Ii. Maintenance of vacuum chamber and vacuum generating system: 1. The vacuum cavity and the electric plate are the working areas of the workpiece. After being used for a certain period of time, some dirt will remain in the cavity and adhere to the electric plate and the wall of the cavity. Treatment method: After continuous use for one month, clean all electric plates and cavity walls with dust-free cloth (paper) dipped in alcohol to keep the cavity clean. 2. The observation window is used by the staff to observe the discharge in the cavity during work. After using for a period of time, the surface of the observation window glass will be slightly corroded, making it blurred. Treatment method: clean the glass with dust-free cloth (paper) dipped in alcohol or acetone or replace the vacuum glass directly. 3. Vacuum pump used in oil for oil to prevent oxidation, change in time is beneficial to the normal work of the vacuum pump, prolong the service life of pump body, suggest changing once every three months, often should observe in the vacuum pump oil is enough, if the oil level of oil level gauge instructions below cut-off use (clearly marked) by the side of the oil level gauge, inject new oil to normal oil amount in time. Iii. Specific steps for replacing vacuum pump oil: 1. Open the oil plug of the refueling port of the vacuum pump (inner hexagon wrench); 2. Open the drain plug on the oil valve (pay attention to the direction of the knob switch); 3. Release the oil safely, and then the oil level in the oil level meter will drop; 4. Tighten the drain plug after cleaning the oil in the pump; 5. Pour the new oil into the filling port and add more than the minimum amount; 6. Tighten the oil filling plug with a hexagon wrench; Note: Please inject pure and special oil when replacing. Remove the original oil from the vacuum pump. Staff should wear rubber gloves and face masks when changing oil. Please dispose of the waste oil properly and safely. Vacuum pump exhaust outlet is connected with oil mist filter, oil mist filter can remove nearly 90% oil mist discharged from the vacuum pump, can prevent the pollution of the working environment, but also can play a silencing effect. The filtered oil must be expelled from the body through the oil return port, otherwise the oil will accumulate between the filter element and the body, which will lead to the formation of oil mist. 1. It is recommended to replace the filter elements every three months. 2. If there is no exhaust, check whether the filter element is blocked, and consider replacing the filter element if necessary. The plasma generator is a high-frequency device, which involves frequency drift and other problems. After use, it should be adjusted once every 2 years or so. The customer should determine the time to contact the manufacturer and return to the factory for correction and adjustment. The seal of the equipment should be replaced every 18 months or so, and then every 18 months to ensure the reliability of the vacuum seal. Iv. Specific maintenance items of vacuum plasma cleaning machine: 1. Check the vacuum pump oil regularly every month to check the oil level and purity of the vacuum pump oil, observe the oil level window, and add to the position between the upper and lower of the oil red line when the oil level is close to the lowest red line scale; Observe the color of the oil. The normal oil is clean and transparent. When the oil becomes turbid (the oil color becomes grayish brown or the oil level window is blurred) and the noise of the vacuum pump is abnormal, replace the vacuum oil in time. 2. Cleaning the reaction chamber: first, use defatted cotton cloth dipped in anhydrous ethanol (commonly known as alcohol) to wipe the vacuum chamber (do not wipe the reaction chamber with ethanol to observe the glass). Secondly, gas (argon + oxygen or nitrogen + oxygen) is introduced into the chamber to react with plasma to remove the residue in the chamber. The processing time should be around 10 minutes, at least once a month. Check the integrity of the gas pipeline and vacuum hermetically. Check the integrity of the vacuum system periodically. This should be done after a thorough cleaning of the reaction chamber to avoid contamination from missing i

MORE +

Principle and composition of vacuum plasma cleaning machine

Vacuum plasma cleaning machine is composed of vacuum generation system, electrical control system, plasma generator, vacuum chamber and related machinery. The vacuum plasma cleaning machine can be customized according to the requirements of customers. Vacuum plasma cleaning machine USES two electrodes to form electromagnetic field, vacuum pump to achieve effective vacuum degree, as the gas is more and more thin, the distance between molecules and molecules or ions free movement distance is also more and more long, the impact of magnetic field and the formation of plasma and produce glow. The plasma moves in space within the electromagnetic field and bombards the surface of the treated object continuously to remove surface oil, surface oxides, ashing surface organics and other chemicals, so as to achieve the effect of surface treatment cleaning and etching. Vacuum ion cleaning machine is widely used in surface decontamination and plasma etching and teflon (PTFE) and the mixture of PTFE etching, plastic, glass, ceramic surface activation and cleaning, such as plasma plating, polymerization process, therefore widely used in automobile industry, electronics, military electronics, PCB industry made high precision. The whole cleaning process of vacuum plasma cleaning machine is roughly as follows: 1. First, feed the cleaned workpiece into the vacuum machine and fix it, start the operating device and start exhaust, so that the vacuum degree in the vacuum chamber can reach the standard vacuum degree of about 10Pa. The average exhaust time is about a few minutes. 2. Then introduce the gas used for plasma cleaning into the vacuum chamber, and keep the pressure in the chamber stable. According to the different cleaning materials, oxygen, argon, hydrogen, nitrogen, carbon tetrafluoride and other gases can be used respectively. 3, indoor vacuum high-frequency voltage applied between the electrode and the grounding device, make the gas be breakdown and occurred by glow discharge plasma ionization and, let the plasma generated in a vacuum chamber in processed workpiece and start cleaning, washing processing last a few seconds to tens of minutes, according to different processing of materials. 4. After the cleaning, cut off the power supply, and pump out the gas and gasified dirt through vacuum pump, and the cleaning is finished. Vacuum plasma cleaning machine has many advantages: such as the use of numerical control technology automation degree; With high precision control device, high time control precision; Correct plasma cleaning will not produce damage layer on the surface, so the surface quality can be guaranteed. The cleaning work is carried out in a vacuum environment. The cleaning process is environmentally safe and does not pollute the environment, and the cleaning surface is effectively guaranteed not to be contaminated by secondary pollution.

MORE +

Plasma cleaning machine principle and cleaning advantages

Plasma cleaning machine cleaning principle: The plasma cleaning machine USES gas as the cleaning medium, which can effectively avoid the secondary pollution caused by liquid cleaning. A vacuum pump is attached to the plasma cleaning machine, and the plasma in the plasma cleaning chamber constantly washes the material surface during the operation. After a short time of cleaning, the organic pollutants can be effectively cleaned off, and then the pollutants can be removed by the vacuum pump, and the cleaning degree can reach the molecular level. In addition to the super cleaning function, the plasma cleaning machine can also change the surface performance of some materials according to the needs under certain conditions. The plasma ACTS on the surface of the material and changes the chemical bonds of the molecules on the surface of the material so that new surface properties can be formed. For some materials with special purpose, the glow discharge of the plasma cleaning machine not only enhances the adhesion, compatibility and infiltration of these materials, but also can achieve disinfection and sterilization. Plasma cleaning machine is widely used in the fields of optics, optoelectronics, electronics, material science, life science, polymer science, biomedicine, microfluidics and so on. Advantages of plasma Cleaning Machine (compared with traditional process): 1. Able to adopt precise numerical control technology with high degree of cleaning automation; With high precision control device, high precision of time control; Correct plasma cleaning will not produce damage layer on the surface of the product surface quality can be guaranteed; The cleaning process is carried out in a vacuum environment, which is an environmentally friendly cleaning process that does not pollute the environment, and effectively avoids the influence of human factors. The cleaning surface will not be contaminated by secondary pollution. 2. Many materials should be cleaned to change their surface tension and improve their adhesion before they need to be bonded. Plasma material and surface organic pollutants have chemical reaction, the waste gas is extracted by the vacuum pump, so as to achieve the purpose of cleaning the surface of the material. The test results show that the surface tension changes significantly before and after cleaning, which is helpful for the next bonding process. Surface modification of the material before surface spraying can improve the spraying effect of the material. Some chemical materials, such as PP or other chemical materials, are hydrophobic or hydrophilic, but they can also be cleaned by plasma through the above process, modify the surface of the material, so that its hydrophilic or hydrophobic to improve, facilitate the next spraying process. 3, the plasma cleaning machine has online production capacity, and can achieve full automation. Plasma cleaning is a very environmentally friendly process. It is not limited by geometric shape, and can be used for surface treatment of powder, small parts, sheet, non-woven cloth, textiles, hoses, hollow bodies, printed circuit boards, etc. It is a nondestructive process without any mechanical changes to the parts. Besides, it meets the harsh conditions such as clean room, easy to use, flexible and simple to operate, and has remarkable treatment effect for various parts and components. The process conditions are controllable, and the cost is low, the effect is good, and the time is short. The appearance of the treated products will not be affected by the high and low temperature of plasma treatment, and the parts will be less heated. The plasma cleaning machine has the advantages of low operation cost, high process safety and operation safety, and is also a cleaning process with remarkable effect after treatment.

MORE +
< 1...192021...132 > proceed page