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Plasma etching solutions for two-dimensional materials in integrated circuits

Plasma etching solutions for two-dimensional materials in integrated circuits

In recent years, there are many two-dimensional materials similar to graphene that have been discovered and studied. Due to its ultra-high mobility, people have paid wide attention to them, such as molybdenum sulfide, black phosphorus, silicon, tungsten selenide and so on. The common characteristics of this kind of two-dimensional materials are: ① is a layered structure, all atoms are located in one or two planes. These materials can form two-dimensional electron-gas transport in the two-dimensional direction, which enables them to have very high mobility in the undoped state, and the threshold voltage is very small. The device does not need to use the reverse region to operate, and does not need to use deep Wells to limit leakage and migration. These advantages will save a lot of plasma doping process for chip processing and greatly save the cost. The difficulty, of course, is finding the right dielectric layer and metal electrode; Predictably, once such materials are used in chip manufacturing, how to improve the contact resistance becomes a whole new problem. ② At present, such materials are not widely available. This kind of two-dimensional material has high activity, rigidity and easy fracture. At the beginning of the study are dispersed by ultrasonic material plasma in benign solvent in the monolayer or multilayer structure, the method of material area is not too big, but with the in-depth study and industrial demand, this kind of material is expected to the growth of large area, only need to explore the substrate material and the growth conditions. (3) Such materials often do not have band structure or very narrow band, which leads to their high activity, easy to capture or release charge. In industry this makes the process more difficult. The thermal conductivity and hardness are also good, and often have the characteristics of the dominant direction of heat conduction and the dominant direction of electrical transmission is different. ⑤ in the direction of the vertical two-dimensional surface conductivity is very low, even insulation. The above characteristics of these materials are both high performance and low practicability characteristics, but there is no doubt that every shortcomings to overcome will make it a step forward in the use of the road, will also bring great commercial value. The etching of these materials is generally difficult, because they are characterized by strong activity, small volume and extremely thin thickness of the target material. It is difficult to control the etching parameters when using strong chemical etching plasma etching. It's obviously not a good idea to use a high-energy plasma, because that would damage the film. At present, there is no mature etching technology to carry out patterning. According to the development of etching technology in recent years, the increasingly mature atomic layer etching or remote plasma etching technology is expected to solve the etching problem of this kind of material. Atomic layer etching has the characteristic of precise positioning etching quantity, and distal plasma etching is the representative of low damage etching technology. In principle, plasma etching of two-dimensional materials is expected to be solved by it, and of course, it is hoped that other new etching processes will emerge. At present, the semiconductor device processing of these two-dimensional materials is mostly in the laboratory stage. The main method of film formation is to peel the lamellar structure from the bulk material. Most of these 2D materials are highly active and have the characteristics of instability when they meet water and air. With time in the air, the morphology of black phosphorus peel changes constantly, and its thickness also increases. It is formed by the interaction with water and oxygen in the air, and this material property will greatly affect the stability of the device. Large area processing difficulties and harsh stability conditions are two major problems in the industrialization of two-dimensional materials. The above is the CRF plasma etching manufacturer of two-dimensional materials in the application of plasma etching solutions in integrated circuits.

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Effect of low temperature plasma treatment on bond strength of fiber piles

Effect of low temperature plasma treatment on bond strength of fiber piles

Influence of low temperature plasma treatment on bond strength of fiber piles: With the continuous improvement of people's living standard and the attention to oral health, more and more attention has been paid to the repair of crown and root injuries. As a country with a large population, China has many patients with tooth defects. During repair, repair materials with sufficient deformation resistance and certain binding strength are required. Fiber piles treated by low temperature plasma At present, there are many materials used for dental repair. Dentists can choose the specific repair materials suitable for patients according to the characteristics of patients. Due to the advantages of corrosion resistance, good biocompatibility, good aesthetics and simple clinical operation, the hard resin base pad after restoration has good mechanical distribution, accord with the normal physiological structure, and has a good protective effect on the remaining tooth tissue, thus reducing the possibility of root fracture after restoration to a certain extent. The clinical application and popularization of fiber piles have attracted the attention of many scholars because of their excellent biocompatibility, biomechanical properties and corrosion resistance. The success of fiber post restoration mainly depends on the bond strength of fiber post - cement - dentin composite interlayer. Since the 1990s, fiber piles have become an effective method to repair residual roots and crowns. Due to the smooth surface of fiber pile, it is difficult to combine with resin cement effectively, resulting in insufficient bond strength and often difficult to achieve satisfactory clinical effect. Physical or chemical treatment can increase the bonding strength of the fiber pile surface. Sandblasting and silane coupling agents are commonly used in clinical practice. However, these methods are often accompanied by some adverse reactions, such as the integrity of the fiber column corrosion, performance reduction. The low temperature plasma treatment on the surface of the fiber column can improve the bonding strength without changing the physical and chemical properties of the raw materials. In clinical practice, the use of fiber post prosthesis can achieve good clinical effect. However, reports of failed fiber pile restoration are not uncommon. Due to the insufficient bond strength of the repair material, it brings serious troubles to the patients and even affects their quality of life. Retention effect of fiber post is an important factor affecting the effect of dental restoration. The bond strength of fiber pile is mainly determined by the interface between resin cement and dentin and the interface between fiber pile and resin cement. Inadequate bonding strength is a common cause of repair failure. The fiber on the surface of the fiber pile is smooth and smooth, and it is difficult to produce with resin material. Resin is a polymer crosslinked polymer material, it is difficult to carry out chemical bonding. In order to improve the bond strength of fiber piles, researchers have done a lot of work, among which the effective technology is plasma surface treatment. After plasma treatment, the mechanical activity of epoxy resin on the surface of fiber pile was improved. After plasma treatment at low temperature, the chemical affinity between the surface of polymer material and the adhesive material of acrylic resin can be increased without damaging the fiber integrity of the surface. Compared with other surface treatment methods, low-temperature plasma treatment is relatively mild, does not cause serious damage to the original physical and chemical structure and properties of the surface, and significantly increases the bonding strength. The surface of the fiber pile was bombarded with plasma, and the results showed that the bonding strength was improved obviously. By introducing oxygen-containing groups on the surface of fiber piles, the chemical bonding effect on the surface of fiber piles can be increased, and the chemical reactions on the surface active components such as oxygen free radicals and resin materials can be made, thus the bonding strength of fiber piles can be improved.

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Influence of plasma surface treatment on sensing performance of flexible conductive fiber

Influence of plasma surface treatment on sensing performance of flexible conductive fiber

PPY (polypyrrole) is a kind of polymer material, with high conductivity, good environmental stability and less toxicity, due to its brittleness, so it is difficult to be processed and directly applied. PPY-coated XLA fibers, due to their strain sensitivity, can be used as a flexible sensor under large strain conditions. But because XLA fibers have a very smooth surface, they require special treatment before they can be coated with conventional chemical vapor deposition. Influence of plasma surface treatment on sensing performance of flexible conductive fiber Plasma treatment can change the surface roughness of fiber. It makes PPY more easily attached to the fiber surface and increases its contact strength with the fiber. The mechanical and strain sensing properties of the conductive XLA fibers treated with different plasma treatment times (5 and 15 min) were compared. Plasma treatment has little effect on the mechanical properties of the fibers, but has great effect on the strain sensing properties of the conductive fibers. Conductive fibers include fibers that conduct electricity themselves or insulating fibers with conductive coatings. Because the conductive fiber itself is flexible and conductive properties. As a kind of sensing material, more and more attention has been paid. Micro/nano scale of PPy apply high elastic fabric surface, because the coating and the body's two materials elastic modulus of the larger differences, PPy under the condition of large strain can produce many micro/nano scales on the fiber surface of small crack, resulting in obvious changes in resistance of the conductive fiber, thus can be applied to flexible perception of large strain sensor. Plasma ionization of "gas", it presents a highly stimulating the unstable state, gas internal charged particles accelerated motion, collision, energy transmission, ionization, discharge to produce ultraviolet, visible light, such as, excitation of the particles, can and the surrounding material produces chemical reaction, some reaction is almost cannot occur under normal conditions, Therefore, plasma has special processing effect. The treatment process is to produce plasma from inert gas or oxygen-containing gas by means of discharge, high-frequency electromagnetic oscillation, shock and high-energy radiation. After plasma treatment, the originally smooth fiber surface was etched uneven, increasing the roughness of the fiber surface, so that the originally smooth XLA fiber is easier to combine with the PPy coating.

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Small vacuum plasma cleaning machine vacuum plasma cleaning surface material modification

Small vacuum plasma cleaning machine vacuum plasma cleaning surface material modification

Small vacuum plasma cleaning machine vacuum plasma cleaning surface material modification Small vacuum plasma cleaning machine can improve the adhesion of the material surface, improve the adhesion performance of the material, solve the problem of adhesion. The effect of vacuum plasma cleaning is very obvious when the contact Angle is measured during the actual operation, and the uniform and thorough adhesion of material modification is improved. Small vacuum plasma cleaning machine is a method to improve the surface adhesion, improve the bonding properties of materials, and solve the problem of bonding. A lot of materials in the factory, originally rely on the corona treatment effect, but the effect of plasma treatment is far better than ordinary treatment. Small vacuum plasma cleaning machine Equipment parameters of vacuum plasma cleaning machine: Customized cavity plasma cleaners from 2 litres to 23 litres or more are available. Here we focus on small vacuum plasma cleaners. The equipment uses a temperature control system to ensure that heat/humidity sensitive materials are not damaged. Can be processed on any product, different products after the actual treatment of the effect is not the same, specific through the contact Angle tester hydrophilicity test, through a large number of tests we found that almost all materials after plasma treatment, hydrophilicity has changed to different degrees. Oxygen argon plasma and hydrogen plasma cleaning: Using different types of gases (oxygen, argon, nitrogen, hydrogen, helium, etc.), small vacuum plasma cleaners can change a variety of properties of the substrate surface. This includes but is not limited to: 1. Improvement of surface tension/surface energy/contact Angle characteristics. 2, improve the adhesion of the surface. 3. Hydrogen plasma is very effective in removing oxides from glass or metal products. 4. Change the wettability of the surface to produce hydrophilicity or hydrophobicity (increase or decrease the adhesion of the liquid)- for pretreatment, coating and coating. 5, coating process: adhesion, wettability, corrosion resistance and wear resistance, electrical conductivity and insulation, magnetic induction, reflective/reflective, anti-microbial, scratch resistance, waterproof, coloring, etc. Plasma activation refers to the treatment of a polymer to improve its ability to be coated or printed. This is done by oxidizing the outer layer of the polymer using an oxygen plasma. Argon is often used in easily oxidized metals. This can not only produce cleaning products, but also increase the polarity, directly improve the printing and coating performance of polymer products, oxygen plasma is also activated by plasma.

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Plasma equipment manufacturer Chengfeng Zhizao professional research and development design of plasma technology

Plasma equipment manufacturer Chengfeng Zhizao professional research and development design of plasma technology

Plasma equipment manufacturer Chengfeng Zhizao professional research and development design of plasma technology The source manufacturer of plasma equipment, Chengfeng Zhizhao, specializes in developing and designing plasma surface treatment technology, which will improve the manufacturing quality of glass and the bonding quality after production in glass manufacturing industry. Adhesion and wetting problems can be solved in many industrial fields by plasma surface treatment technology. Plasma surface treatment and activation technology is a new treatment method which is both economical and environmental protection. It also greatly increases the wetting and adhesion of the glass substrate. Before the actual coating, painting, and bonding process, it was considered to be a highly efficient method of surface activation. Non-viscous polymer surface activation also has an effect. Plasma surface treatment equipment has flexibility, can help enterprises in the production process to improve reliable performance guarantee, to achieve the purpose of hydrophilic activation modification. Second, because the operation cost is low, so it is considered to be environmental protection process. Plasma Equipment Manufacturer Plasma treatment of plasma equipment to improve adhesion and surface cleaning, Chengfeng Intelligent Manufacturing provides automatic plasma equipment cleaning, detection of the overall solution. Components preparation is an important step before bonding, painting, painting and painting. Plasma treatment provides an economical way to clean and activate the surface of the part to be further machined. Plasma equipment surface treatment improves the wettability and adhesion of inks, glues and coatings on different surfaces. If you need to understand the technology behind the surface treatment technology, we recommend you to visit our company, participate in the treatment process, familiar with the working principle of plasma. The company's plasma treatment equipment and products also provide surface treatment and a green solution to clean complex surfaces before the next treatment. This method is especially suitable for the contours of complex surfaces that cannot be treated by conventional processing mechanisms. Plasma surface treatment equipment is used for the long-term bonding of plastic and metal, and has a variety of customized solutions for products. Plasma treatment has been used in all industrial production processes, we have many years of experience in providing customers with suitable surface treatment equipment. Plasma technology equipment is used before the material can be painted, printed or bonded. Plasma treatment can be used for surface treatment of various materials before coating, printing or bonding. So this can also be called surface pretreatment. Plasma treatment technology can remove impurities on the surface of the material and facilitate further processing. If left untreated, materials such as plastics easily lose any kind of print or coating on their surfaces because of their glossy texture. Plastics are made of polypropylene, which has the same polarity and therefore do not stick easily. After activation by plasma surface treatment, the adhesive force of the plastic has changed remarkably.

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Small vacuum plasma cleaning machine vacuum plasma cleaning surface material modification

Small vacuum plasma cleaning machine vacuum plasma cleaning surface material modification

Small vacuum plasma cleaning machine vacuum plasma cleaning surface material modification Small vacuum plasma cleaning machine can improve the adhesion of the material surface, improve the adhesion performance of the material, solve the problem of adhesion. The effect of vacuum plasma cleaning is very obvious when the contact Angle is measured during the actual operation, and the uniform and thorough adhesion of material modification is improved. Small vacuum plasma cleaning machine is a method to improve the surface adhesion, improve the bonding properties of materials, and solve the problem of bonding. A lot of materials in the factory, originally rely on the corona treatment effect, but the effect of plasma treatment is far better than ordinary treatment. Small vacuum plasma cleaning machine Equipment parameters of vacuum plasma cleaning machine: Customized cavity plasma cleaners from 2 litres to 23 litres or more are available. Here we focus on small vacuum plasma cleaners. The equipment uses a temperature control system to ensure that heat/humidity sensitive materials are not damaged. Can be processed on any product, different products after the actual treatment of the effect is not the same, specific through the contact Angle tester hydrophilicity test, through a large number of tests we found that almost all materials after plasma treatment, hydrophilicity has changed to different degrees. Oxygen argon plasma and hydrogen plasma cleaning: Using different types of gases (oxygen, argon, nitrogen, hydrogen, helium, etc.), small vacuum plasma cleaners can change a variety of properties of the substrate surface. This includes but is not limited to: 1. Improvement of surface tension/surface energy/contact Angle characteristics. 2, improve the adhesion of the surface. 3. Hydrogen plasma is very effective in removing oxides from glass or metal products. 4. Change the wettability of the surface to produce hydrophilicity or hydrophobicity (increase or decrease the adhesion of the liquid)- for pretreatment, coating and coating. 5, coating process: adhesion, wettability, corrosion resistance and wear resistance, electrical conductivity and insulation, magnetic induction, reflective/reflective, anti-microbial, scratch resistance, waterproof, coloring, etc. Plasma activation refers to the treatment of a polymer to improve its ability to be coated or printed. This is done by oxidizing the outer layer of the polymer using an oxygen plasma. Argon is often used in easily oxidized metals. This can not only produce cleaning products, but also increase the polarity, directly improve the printing and coating performance of polymer products, oxygen plasma is also activated by plasma.

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Address:1303, Building 3, Manjinghua Science and Innovation Workshop, No.6 Songjiang Road, Songgang Street, Bao'an District, Shenzhen, China.

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