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Circuit board plasma etching cleaning equipment to remove surface material polysilicon impurities and remove glue

Circuit board plasma etching cleaning equipment to remove surface material polysilicon impurities and remove glue

Circuit board plasma etching cleaning equipment to remove surface material polysilicon impurities and remove glue: With the continuous development of semiconductor process technology, wet etching technology has gradually limited its development due to its inherent limitations, and can no longer meet the processing requirements of VLSI micron or even nanowires. Plasma etching cleaning equipment Polycrystalline silicon wafer cleaning equipment Dry etching method has gradually been widely used in semiconductor processing due to its high ion density, uniform etching, high verticality of etched sidewalls, high surface finish, and ability to remove surface impurities. . Plasma surface treatment machine removes glue, and the gas for removing glue is oxygen. In the invention, the circuit board is placed in a vacuum reaction system, a small amount of oxygen is introduced, and a high frequency and high voltage are added, and a high frequency signal is generated by a high frequency signal generator, and a strong electromagnetic field is formed in the quartz tube to ionize oxygen. The mixed substances such as oxygen ions, oxygen atoms, oxygen molecules, and electrons form a glow column. Active atomic oxygen can rapidly oxidize the residual colloid into volatile gas, and make it volatilize and be taken away. With the development of modern semiconductor technology, the requirements for etching processing are getting higher and higher, and the plasma etching cleaning equipment for polysilicon wafers has also emerged as the times require. Product stability is one of the key factors to ensure the stability and repeatability of the product production process. CRF Chengfeng Zhizao plasma cleaning machine is a multi-functional plasma surface treatment equipment. By configuring different components, it has various functions such as coating (coating), corrosion, plasma chemical reaction and powder plasma treatment. After removing the residue from the circuit board, clean the circuit board. The circuit board plasma surface treatment machine has the advantages of simple operation, high glue removal efficiency, clean and smooth surface, no scratches, low cost and environmental protection. It has a good etching effect on polycrystalline silicon wafers by plasma cleaning machine/etching machine. By configuring the etching components, the utility model can make the plasma etching cleaning equipment made by CRF Chengfeng realize the etching function. The degumming process of the plasma surface treatment machine is an important link in the micro-fabrication. After the micro-nano processing such as electron beam exposure and ultraviolet exposure, the photoresist needs to be degummed or primed. Whether there is damage to the sample due to the cleanliness of the photoresist removal will directly affect the smooth implementation of the subsequent process. Plasma cleaning machine is a device that uses the characteristics of low temperature plasma to perform plasma surface treatment on treated materials. Generally, after plasma treatment, the material will have surface tension, wettability and hydrophilicity. When the dyne value changes, the dyne value will also change. There are many materials suitable for testing dyne pens, such as stainless steel, glass, plastic, ceramic lamps, etc. The dyne value is mainly reflected by the dyne pen, also known as surface tension detection pen, corona treatment pen and plastic film surface tension detection pen. Use 32, 34, 36, 38, 40, 42, 44, 46, 48, 50, 52, 54, 56, 58, 60 and other test pens with different tensions to test the surface tension of the sample to determine whether the surface tension of the sample is to the required value. Chengfeng Zhizao's plasma surface treatment machine adopts components with excellent performance, which can control process parameters, and its process monitoring and data acquisition software can achieve strict quality control. The technology has been successfully applied in power transistors, analog devices, sensors, optical devices, optoelectronics, electronic devices, MOEMS, biological devices, LEDs and other fields. Through plasma surface cleaning and activation treatment, the surface energy of conventional materials can be improved, which is reflected in the material's dyne value improvement test. The polymer plastic samples were treated by Chengfeng Zhizhi plasma cleaning machine, and the dyne values ​​were compared before and after treatment. Before untreated, dyne scribed on the surface of the sample. After 40# scribed, it slowly shrank, and beads appeared, indicating that the dyne value was between 30 and 40; It can be evenly distributed, and there is no beading point, indicating that the dyne value of the sample surface is greater than 50. After being treated by a plasma cleaner, the surface tension of the material can be increased and the surface energy can be increased, which provides the possibility for subsequent processes and material applications. Using CR

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Plasma cleaner pretreatment DLC tungsten carbide aspherical mirror carbon film and wood wetting effects

Plasma cleaner pretreatment DLC tungsten carbide aspherical mirror carbon film and wood wetting effects

Plasma cleaner pretreatment DLC tungsten carbide aspherical mirror carbon film and wood wetting effects: Plasma cleaning machines are widely used in the activation and modification cleaning of precision electronics, semiconductor packaging, automobile manufacturing, biomedical, optoelectronic manufacturing, new energy, textile printing and dyeing, packaging containers, household appliances and other industries. The wettability of wood pulp is an important interface property that characterizes the difficulty and effect of wetting, spreading and bonding on the surface of wood pulp when certain liquids (water, binders, oxidants and cross-linking agents, etc.) are in contact with wood pulp. Plasma pretreatment is of great significance to the interface of wood pulp and various modification processes. The tungsten carbide aspherical mirror carbon film on the DLC surface is cleaned by a plasma cleaning machine, and the plasma cleaning machine is very effective in cleaning the tungsten carbide aspherical mirror carbon film on the DLC surface. After the aspheric mirror surface DLC film is treated by the plasma cleaning machine, the removal effect is good, and the film residues such as dirty, messy and miscellaneous surfaces can be removed. Wood pulp is a natural high molecular polymer, which not only has dual properties of biology and physicochemical, but also is a non-uniform anisotropic material. Its surface structure and chemical composition will affect the glue performance of wood pulp, thereby affecting wood The overall strength, toughness, durability and other properties. Test method: Put the wooden veneer on the lower tray of the plasma cleaning machine, then place it in the reaction chamber, and close the chamber door. Then turn on the vacuum pump, evacuate, pump to the corresponding vacuum value, turn on the gas required for plasma treatment, and press the start button to perform plasma treatment. Determination. Because plasma treatment is time-sensitive, the treated samples must be tested for surface contact angle in the shortest possible time. Chengfeng Zhizao has developed small plasma cleaning machines for universities and scientific research units. An experimental platform developed by scientific research institutions and corporate laboratories, or creative small-scale production enterprises. It has rich information in customer use, application demand analysis, and many years of experience in design and manufacturing. Small multifunctional plasma surface treatment equipment is a huge investment, both in design concept and in choice of accessories. The company can provide corresponding accessories according to the different requirements of customers, with surface plating (coating), etching, plasma chemical treatment, powder plasma treatment and other functions, and at the same time achieve conventional performance. RESULTS AND ANALYSIS After pretreatment with a plasma cleaner, the contact angle decreased from 113.8° to about 50° after about 3 minutes. With the prolongation of the treatment time, the change of the contact angle tended to be stable or slightly increased, especially when the treatment time exceeded For more than 7 minutes, the wood surface is greatly affected by high-energy electrons, the ions are relatively uninterrupted, the energy accumulation is large, and the local area has too deep etching. , carbonyl and other chromophoric groups, and the high-energy plasma discharge increases the temperature of the wood surface, which is easy to cause local color to darken and cause carbonization. Low-temperature plasma discharge treatment is performed on the wood, and the treatment time is preferably 3 minutes.

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Comparison of plasma-modified MH-Ni polypropylene battery separator hollow cathode before and after remote treatment:

Comparison of plasma-modified MH-Ni polypropylene battery separator hollow cathode before and after remote treatment:

Comparison of plasma-modified MH-Ni polypropylene battery separator hollow cathode before and after remote treatment: Polypropylene has high chemical stability and good mechanical properties, small specific gravity and specific resistance, excellent air permeability, low price, low energy consumption, no pollution, and is an ideal battery separator substrate. However, because there are no hydrophilic groups in the macromolecular structure of polypropylene, the crystallinity is high, the fiber cross section is round, the structure is dense, and the lack of micropores and gaps, its hydrophilicity is extremely poor. In order to improve the wettability of polypropylene fiber separator to electrolyte, it can be treated by wetting method and surface modification method. In the wetting method, the hydrophilic group cannot be fixed on the surface of the separator material in a chemically bonded state, so the life span is short. Plasma surface modification is mainly to improve its hydrophilicity by introducing functional hydrophilic groups or depositing a hydrophilic polymer film on the surface of the polypropylene battery separator, so as to improve the alkali absorption performance of the separator. At present, most of them are directly processed by low temperature plasma discharge. However, the traditional low-temperature plasma discharge direct treatment method has disadvantages such as low ion concentration, low treatment efficiency, surface contamination and thermal stress, and its application scope is limited. The plasma concentration of radio frequency discharge can be increased by an order of magnitude, resulting in a higher polymerization rate. At the same time, the plasma is to place the experimental sample away from the plasma treatment area. The energy of the active particles in the far area is moderate. The plasma polymerization reaction has mild reaction, few side reactions, strong controllability, and polymerization grafting. The membrane structure is easy to control and so on. Plasma equipment modified the separator for alkaline secondary battery-MH-Ni battery, and the plasma treatment conditions affected the performance of polypropylene separator. The high alkali absorption of the diaphragm can effectively reduce the electrochemical polarization and concentration polarization of the electrode reaction, fully reduce the internal resistance of the battery during the charging and discharging process, make the discharge reaction more sufficient and complete, and improve the utilization rate of active materials. With the increase of air flow, the activated plasma state increases, and more acrylic acid is grafted faster. Therefore, the alkali absorption rate and alkali absorption rate of the polypropylene diaphragm are gradually increased. However, after reaching a certain flow rate, under the condition that the discharge power remains unchanged, the increase of the gas flow rate leads to an excessively high gas density, which makes the energy of a single charged particle smaller, and at the same time causes more energy loss in the collision between particles. , affecting the effect of acrylic polymer deposition. After plasma cleaning, the alkali absorption rate of the diaphragm decreases correspondingly, but the alkali absorption rate does not decrease much. This may be part of the buildup on the treated battery separator, the polyacrylic film is not firmly bonded to the polypropylene. After cleaning, this part of the polyacrylic acid film fell off, resulting in a great reduction in the rate of alkali absorption. The alkali absorption rate experiment was carried out after the treated diaphragm was fully infiltrated. Even if the alkali absorption rate of the diaphragm decreased, the total alkali absorption rate did not change much. The comparison between untreated polypropylene battery separator and plasma treatment shows that hydrophilic carboxyl groups are introduced on the surface of polypropylene fiber after plasma treatment. The untreated battery separator is relatively smooth, while the treated separator fibers are distributed with a sheet-like polyacrylic acid film, and the surface becomes rough. In addition, the characteristic peaks of polypropylene are still well preserved, indicating that although the separator has been treated, its own characteristics have not been affected.

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SiO polymer electronic paste ultra-fine glass powder polymerized on the surface of plasma-modified powder

SiO polymer electronic paste ultra-fine glass powder polymerized on the surface of plasma-modified powder

SiO polymer electronic paste ultra-fine glass powder polymerized on the surface of plasma-modified powder: The ultra-fine powder in the electronic paste is generally inorganic powder, the large particle size is generally not more than 15pum, the average particle size is less than 5pum, the specific surface area is large, it is easy to agglomerate to form large secondary particles, and it is difficult to be used in organic carriers. dispersion. The uniformity and stability of the dispersion in the organic carrier have a great influence on the printing performance of the paste and the performance of the prepared electronic components. Using hexamethyldisiloxane (HMDSO) as a monomer, a thin layer of silicon oxide polymer was polymerized and coated on the surface of inorganic glass powder by plasma to improve its dispersibility in organic carrier and adjust the rheology of electronic paste , printing suitability and sintering performance, improve the performance of electronic paste to meet the requirements of new electronic components and screen printing technology progress. The parameters affecting plasma polymerization are: background vacuum, working pressure, ratio of monomer HMDSO to working gas argon, power supply, processing time, working temperature, etc. For the untreated powder tablet, when the contact angle is measured, the potassium permanganate aqueous solution with a mass fraction of 0.1% is instantly absorbed on the surface of the powder tablet, and after the treatment, the droplet can be stabilized on the powder tablet. Exists without wetting the powder. The longer the discharge time, the higher the monomer concentration in the gas, and the higher the power supply, the larger the powder contact angle. This is mainly because the more low-surface-energy SiOx polymers formed by polymerization on the powder surface, the stronger the surface hydrophobicity. When the SiO polymerized on the surface of the powder, the polymer completely covers the surface of the powder, the contact angle reaches a large, and the surface energy reaches a low saturation state. Therefore, it is possible to change or control the surface energy of the powder by changing the amount of SiO coated on the surface of the powder and the amount of polymer, improving its dispersibility in the organic carrier, and adjusting and controlling the rheological properties of the electronic slurry, Printability and sintering properties. Plasma-polymerized powders are smoother, finer, and less wet than untreated powders. The treated powder can move farther and flow better when splashed. Fineness is a direct index to evaluate the dispersion quality of ultrafine powder. Therefore, the powder treated by plasma polymerization is not easy to agglomerate and has good dispersion performance. The initial viscosity of the electronic paste prepared with untreated powder increased slightly, indicating the existence of powder agglomerates in the paste. The viscosity of the electronic paste prepared by the powder after treatment conforms to the viscosity change law of a typical pseudoplastic fluid, and the viscosity is shear thinning. When the electronic paste is screen printed, its viscosity is required to be rapidly thinned and non-stick to the screen under the action of the scraper, and the viscosity can be rapidly increased after printing to ensure the accuracy of the printed graphics. The rheology and printability of the electronic paste prepared from the powder treated by plasma polymerization were better. After plasma treatment, the dispersion performance of the powder in the organic carrier has been significantly improved. During the plasma treatment process, the SiO formed by polymerization on the surface of the powder reduces the surface energy of the powder and prevents the agglomeration between the powders: on the one hand, it reduces the surface energy difference with the organic carrier, and on the other hand, it reduces the surface energy of the powder. Active groups are added on the surface of the particles, which increases the compatibility between the powder and the organic carrier, so that the powder is not easy to agglomerate and is easy to stably disperse in the organic carrier.

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On-line plasma cleaning machine surface treatment technology automotive parts leather products treatment

On-line plasma cleaning machine surface treatment technology automotive parts leather products treatment

On-line plasma cleaning machine surface treatment technology automotive parts leather products treatment: Leather products are products with a relatively fashionable appearance, comfortable touch texture, and high quality. Leather actually has a huge market usage. For example, people are relatively familiar with: leather sofas, leather chairs and other leather furniture; leather bags, Leather daily necessities such as luggage; leather seat cushions, steering wheel covers and other automotive decorative leather... Leather products are favored by market consumers because of their changing colors, patterns and types, and the market introduction rate is also relatively high every year. , which can meet people's individual needs for aesthetics and use. In recent years, the overall industry of leather products is also developing towards diversification and refinement. Therefore, in the production and manufacture of leather products, a combination of different physical and chemical methods will be used. Some car brands that pursue quality, not only have requirements for the safety and stability of the whole vehicle, but also pay special attention to the comfort of driving. Therefore, leather or artificial leather materials are often used in some car interiors, such as automobiles. Leather seats, leather-covered steering wheel, etc. In the leather coating process of automobile interior parts, in order to pursue aesthetics, it is often necessary to make folds and other effects during the coating. Because of this, when the leather material is coated, the adhesive force of the material is very high. There is often a need to be able to adhere quickly and securely, otherwise the resulting folds will spring back. If you encounter such a leather bonding problem, it is not complicated in the eyes of experienced engineers, and the plasma surface treatment technology of the online plasma cleaning machine can solve the vast majority of such bonding problems. The online plasma cleaning machine is a dry cleaning method without any environmental pollution in a fully automatic state. To achieve surface cleaning treatment before bonding, soldering, electroplating, surface modification of biological materials, surface activation treatment before printing coating or bonding.   Continuous/semi-continuous processing, high efficiency, high precision, fast response, good maneuverability and compatibility, perfect functions and professional technical support. Plasma surface treatment technology can use plasma to clean, activate, and etch the leather surface to make the leather surface cleaner and more active, and at the same time, it can also obtain a slightly rough surface. The binder and adhesive in the ink can penetrate into the pores of the dermis layer of leather products more easily, and after curing, a mechanical anchoring effect can be formed, and good adhesion and reliability can be obtained. Surface treatment technology of plasma cleaning machine It will not cause any damage to the leather surface, and is a new surface treatment technology that is energy-saving, environmentally friendly, efficient and low-consumption. Surface modification treatment of flexible roll materials, suitable for textile materials, printing and coating, flexible circuit boards, film preparation, solar energy and other industries. Using the surface treatment technology of the online plasma cleaning machine can carry out highly targeted treatment. By treating the steering wheel substrate or leather products with plasma, the organic pollutants, grease and additives on the surface can be effectively removed to form a clean surface. At the same time, the activation of plasma can also form hydrophilic active groups such as hydroxyl and carboxyl groups on the surface of the substrate, which can improve the surface energy of the substrate, thereby improving the adhesion with adhesives and leather materials, ensuring the packaging The beauty and firmness of the cover.

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Changes of surface activity of nylon dental materials treated with plasma surface processor

Changes of surface activity of nylon dental materials treated with plasma surface processor

Changes of surface activity of nylon dental materials treated with plasma surface processor: With the continuous improvement of nylon processing technology and modification technology, the application scope of plasma surface treatment has expanded rapidly, and the application requirements of nylon surface cleaning, material protection, enhancing adhesion or dyeing are increasing. However, the structure of various nylon materials is different, and the corresponding surface properties are also very different. In order to adapt to various applications, plasma surface treatment technology came into being. Titanium is an inert metal material with low biological activity and is easily wrapped in a fibrous membrane after implantation in the jawbone. The lack of initiative results in long osseointegration times, poor initial stability, and low long-term success rates. However, pure titanium has low hardness, poor fatigue strength and wear resistance. During the use of titanium implants, failures such as loosening of abutment screws, pitting corrosion, wear and corrosion of connecting threads occur, which seriously affect the reliability and service life of the implant system. . Plasma surface treatment provides adhesion to nylon surfaces and improves surface hydrophilicity and wettability by introducing polar organic functional groups to the surface. Clean surface and surface wettability play an important role in the color combination of the two surfaces. Surface wetness depends on the surface condition of the nylon itself and all nylon dyed materials. The surface tension of these dyed materials can be reached to the required value by efficient treatment with low temperature plasma. After the plasma equipment was treated and modified, the water droplets of the contact angle tester slipped down from the top of the implant, and the angle value could not be determined and was close to 0. Existing experiments have proved that under the corresponding process gas and other conditions, the super-hydrophilic change on the surface of dental implant titanium implants by plasma treatment has important medical significance. Before processing: the contact angle of the nylon tube is 78.16°; After the plasma cleaning machine, the contact angle of the nylon tube is close to 0°; Result: Plasma treatment by plasma surface processor can significantly change the surface activity of nylon material, and can significantly improve its surface energy and hydrophilicity, and enhance the dyeing ability. Due to the unique physical and chemical properties of the surface material and its successful application in finishing, lubrication, bonding, foaming, waterproofing and biomedical materials, its wetting performance is one of the important properties of the surface material, which mainly depends on Microgeometry and chemical composition of surface materials. The adsorption and proliferation experiments of osteoblasts were carried out using a plasma surface processor, and the results showed that their surface oxidation activity was better than that of heat treatment. The superhydrophobic surface was prepared by the method of molecular self-assembly, and the contact angle can reach more than 130 degrees. The conversion and control of sample superhydrophilicity and superhydrophobicity can be realized by plasma treatment with a plasma surface processor.

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