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(1) how to maintain the vacuum plasma cleaning machine vacuum pump
① regularly check the vacuum pump oil regularly check the vacuum pump oil level and oil purity every month, observe the oil level window, when the oil level is close to the lowest red line scale, then add to the position between the upper and lower oil red mark line; observe the color of the oil, the normal oil is clean and transparent, when the oil appears turbid (oil color becomes gray-brown or the oil level window is blurred), the vacuum pump noise is abnormal, then replace the vacuum oil in time.

 

(2) vacuum plasma cleaning machine cavity with contaminants do
① Most of the dirt generated during plasma cavity cleaning is close to the electronic level and will be eliminated with the vacuum pump. However, there will be some large particles of contaminants produced. These large particles of dirt will adhere to the cavity walls, electrodes and pallet holders. There is a thin layer of "dust" on the cavity walls and the cavity low fall off is worse. The cavity wall should be cleaned with a brush that cannot fall off, so that the particle dust foreign matter in the cavity wall off, with a vacuum machine to suck out the dirt. Wipe with skimmed cloth with alcohol, followed by the introduction of N2 and O2 into the cavity, and use plasma to remove the residue in the cavity, working for 10min.